Study on a RF-SAW filter made of diamond

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Diamond has the highest known SAW phase velocity, sufficient for applications in the gigahertz range. In addition, diamond is also free from rare earth and rare metal materials. Although numerous studies have demonstrated SAW devices on polycrystalline diamond thin films, all of these devices have a much larger propagation loss than single-crystal materials such as LiNbO3. Hence, we fabricated and characterized one-port SAW resonators on single-crystal diamond to identify and minimize sources of propagation loss. A series of one-port resonators were fabricated, and their characteristics were measured. The best performing device using a diamond single crystal exhibited a resonance frequency of 5.2 GHz, and the equivalent circuit model gave a quality factor of 8346. Thus, the propagation loss was found to be only 0.004 dB/wavelength. The result shows that single-crystal diamond SAW resonators have great potential for use in RF-filters as sustainable SAW devices.