Study on a RF-SAW filter made of diamond

金刚石射频声表面波滤波器的研究

• 批准号: 23560387
• 负责人: FUJII SATOSHI
• 金额: $ 3.33万
• 依托单位: Chiba University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2013
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23560387/
• 关键词: 弾性表面波; ダイヤモンド; 弾性表面波素子; 共振子; RF-SAW; SAW共振子; 伝搬損失

Diamond has the highest known SAW phase velocity, sufficient for applications in the gigahertz range. In addition, diamond is also free from rare earth and rare metal materials. Although numerous studies have demonstrated SAW devices on polycrystalline diamond thin films, all of these devices have a much larger propagation loss than single-crystal materials such as LiNbO3. Hence, we fabricated and characterized one-port SAW resonators on single-crystal diamond to identify and minimize sources of propagation loss. A series of one-port resonators were fabricated, and their characteristics were measured. The best performing device using a diamond single crystal exhibited a resonance frequency of 5.2 GHz, and the equivalent circuit model gave a quality factor of 8346. Thus, the propagation loss was found to be only 0.004 dB/wavelength. The result shows that single-crystal diamond SAW resonators have great potential for use in RF-filters as sustainable SAW devices.

金刚石具有已知最高的 SAW 相速度，足以满足千兆赫范围内的应用。此外，金刚石还不含稀土和稀有金属材料。尽管大量研究已经证明了多晶金刚石薄膜上的声表面波器件，但所有这些器件都比 LiNbO3 等单晶材料具有更大的传播损耗。因此，我们在单晶金刚石上制造并表征了单端口 SAW 谐振器，以识别并最大程度地减少传播损耗源。制造了一系列单端口谐振器，并测量了它们的特性。使用金刚石单晶的性能最佳器件的谐振频率为 5.2 GHz，等效电路模型给出的品质因数为 8346。因此，发现传播损耗仅为 0.004 dB/波长。结果表明，单晶金刚石 SAW 谐振器作为可持续 SAW 器件在射频滤波器中具有巨大的应用潜力。

项目成果

High‐frequency surface acoustic wave filter based on diamond thin film

• DOI: 10.1002/pssa.201000064
• 发表时间: 2011-05
• 期刊: physica status solidi (a)
• 作者: S. Fujii

Deposition of Highly C-Axis Oriented ScAlN Thin Films by RF Magnetron Sputtering Using a Sc-Al Alloy Target

使用 Sc-Al 合金靶材通过射频磁控溅射沉积高度 C 轴取向的 ScAlN 薄膜

• 发表时间: 2014
• 作者: S. Fujii;S. Shimizu;M. Sumisaka;Y. Suzuki;S. Otomo;T. Omori;K. Hashimoto
• 通讯作者: K. Hashimoto

IEEE Transactions on Ultrasonics

IEEE 超声波学报

• 发表时间: 2012
• 期刊: Ferroelectrics, and Frequency Control
• 作者: S. Fujii;C. Jian
• 通讯作者: C. Jian

High Frequency SAW Devices Using a Single Crystal Diamond

使用单晶金刚石的高频 SAW 器件

• 发表时间: 2012
• 作者: S. Fujii;H. Yamada;T. Omori;K. Hashimoto;H. Torii;H. Umezawa;S. Shikata
• 通讯作者: S. Shikata

単結晶ダイヤモンドを用いた高周波SAW共振子

使用单晶金刚石的高频 SAW 谐振器

• 发表时间: 2011
• 作者: 山田晴也;藤井知;小田原達矢;大森達也;橋本研也;鳥居博典;梅澤仁;鹿田真一
• 通讯作者: 鹿田真一