Study on Technique of Gaseous Ion Nonobeam Formation Using Acceleration Tube as a Final Focusing Lens

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Acceleration lens system for several hundred keV ion microbeams, which is scalable to MeV ones, was designed and manufactured aiming to develop a compact/laboratory-use size MeV ion microbeam system. Specifically, a three-stage acceleration lens system was developed by adding a new single-gap third acceleration lens with high voltage gradient for enhancing beam energy to an existing two-stage acceleration lens. The experimental result on formation of ion microbeams using the several hundred keV microbeam system with this three-stage acceleration lens showed the effectiveness within the energy range of keV, and lead the fundamental structure of the third acceleration lens for formation of MeV ion microbeams.