Development of high demagnification lens system by forming a virtual object

通过形成虚拟物体开发高倍率透镜系统

• 批准号: 20560779
• 负责人: ISHII Yasuyuki
• 金额: $ 3万
• 依托单位: Japan Atomic Energy Agency
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20560779/
• 关键词: 放射線工学; ビーム科学; 集束ガスイオンビーム; 加速レンズ; 高縮小率; 超小型ガスイオンナノビーム形成装置; 小型ガスイオンナノビーム形成装置; 二段加速レンズ系; 平行ビーム加速電極

Enhancement of the demagnification at an acceleration lens system was studied to generate several tens keV gaseous ion nanobeam using the nano-beam formation apparatus in JAEA. The concept of the enhancement of the demagnification was as follows ; (1) Several hundred eV gaseous ion beam (low energy gaseous beam) with a small imaginary object was generated by a dedicated plasma-type ion source. (2) Its low energy gaseous ion beam was injected into the two-stage acceleration lens system. A direct beam extraction electrode system was installed in the ion source to generate ion beams with the small divergence angle. A minimum hydrogen beam size of 120 nm in diameter with 36 pA at 47 keV was successfully formed by the experiment as the beam trajectory simulation. The focusing lens system with the demagnification over 1700 was composed of combining the plasma-type ion source with the direct extraction electrode and the two-stage acceleration lens system.

利用日本原子能机构（JAEA）的纳米束形成装置，研究了加速透镜系统的缩小率的提高，以产生几十keV的气态离子纳米束。缩小率的增强的概念如下：（1）由专用等离子体型离子源产生具有小假想物体的数百eV气体离子束（低能气体束）。(2)其低能气体离子束注入两级加速透镜系统。在离子源中安装了一个直接引出电极系统，以产生小发散角的离子束。作为束流轨迹模拟，实验成功地形成了47 keV、36 pA、直径为120 nm的最小氢束流。将直接引出电极等离子体型离子源与两级加速透镜系统相结合，构成了缩小率大于1700的聚焦透镜系统。

项目成果

Design of a compact focusing lens system with short acceleration tube at 300 kV

300 kV 短加速管紧凑型聚焦透镜系统设计

• DOI: 10.1016/j.nimb.2011.02.029
• 发表时间: 2011
• 期刊: Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
• 影响因子: 1.3
• 作者: Y. Ishii;T. Ohkubo;T. Kojima;T. Kamiya
• 通讯作者: T. Kamiya

Theoretical Approach of the Reduction of the Chromatic and Spherical Aberrations in an Acceleration Lens System for gas-FIB to Form Gaseous Nanobeam

气体-FIB 形成气态纳米束的加速透镜系统中减少色差和球差的理论方法

• 发表时间: 2011
• 期刊: AIP Conf.Proc. Vol.1336
• 作者: T.Ohkubo;Y.Ishii;T.Kojima;T.Kamiya
• 通讯作者: T.Kamiya

Design of a Compact Gaseous Ion Nanobeam Apparatus with a High Demagnification Acceleration Lens System

具有高倍率加速透镜系统的紧凑型气态离子纳米束装置的设计

• 发表时间: 2010
• 作者: Y.Ishii;T.Ohkubo;T.Kamiya
• 通讯作者: T.Kamiya

300kV領域小型集束ガスイオンナノビーム形成装置の開発

300kV区域紧凑型聚焦气体离子纳米束形成装置研制

• 发表时间: 2010
• 期刊: Proceedings of the Twelfth Symposium on Accelerator and Related Technology
• 作者: 石井保行;大久保猛;神谷富裕
• 通讯作者: 神谷富裕

11th International Conference on Nuclear Microprobe Technology and Applications, Reduction of Aberration Coefficients in an Accelerator Lens System to Form the Gaseous Ion Nanobeam

第十一届核微探针技术与应用国际会议，减少加速透镜系统中形成气态离子纳米束的像差系数

• 发表时间: 2008
• 作者: 大久保猛;石井保行
• 通讯作者: 石井保行