Preferential sputtering of polymer surface using Ar cluster ion beam

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In this study, we measured SIMS spectra of organic thin film and a contaminated substrate sample using gas cluster ion projectiles, and then analyzed the data using the self-modeling curve resolution method (SMCR). As a result, we could classify many secondary ion peaks into 3 or 4 species.As a result, the many secondary ion peaks from the contaminant and sample is classified into the components from methacrylic acid, that from acrylic acid and that from silane coupling agents. And alsowe have finished the development of the XPS apparatus in the lab. In the next step, we will study the mechanism of GCIB sputtering processes using the SIMS and XPS.