The coating removal technology by cluster plasma:Expansion into glass lens mold

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For reuse of the mold, a method of removing damaged coating without roughening the mold is required.Therefore, for the purpose of developing a uniform coating removal process which does not rough mold, using cluster ions having a smoothing effect, in order to irradiate the entire mold, techniques of cluster ions in the plasma state was studied.It was found experimentally that if the appropriate conditions is selected, it is possible to remove coating on glass lens mold substantially uniformly without roughening the mold.