Characterization and Application of Thin-Film PZT/PZT Bimorph

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Double layer Pb[Zr,Ti]O_3(PZT, Lead Zirconate Titanate) thin films was realized for MEMS applications. The total thickness of the bimorph PZT/PZT structure is 5.4 μm, which is much thicker conventionally reported ones (typically 1 μm). In addition, the electric and piezoelectric characteristics for top and bottom PZT layers were consistent with each other. By fabricating MEMS mirror with four PZT/PZT bimorph beams, the applicability of the PZT/PZT bimorph to MEMS fabrication process was confirmed. The bimorph beams doubled the deflection of the MEMS mirror compared with unimorph actuations.These results demonstrate that the PZT/PZT bimorph is effective to MEMS actuators.