High sensitive probe for magnetic resonance force microscopy

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Nanowire cantilever sensors made of Si with a magnetic particle on the tip were fabricated for the study of bi-stable polymer material properties using magnetic resonance force microscopy (MRFM). The mirror part at the middle of cantilever was designed for interferometer to measure the deflection of the nanowire cantilever. Single NdFeB particle of 3.5 micron is mounted on the apex of the cantilever. The bi-stable polymer called PVBPT, which can hold radicals inside of the film after oxidation was used. The PVBPT sample was measured using the MRFM system, and the magnetic resonance force signals were detected by scanning the sample in XYZ directions. As the conclusion of this research, the potential of imaging the radicals in film or the defects on the surface of silicon by using high sensitive silicon nanowire probes is improved.