Fabrication of low-cost oxide LED without minor metals and toxic elements by atmospheric pressure film formation method

常压成膜法制备不含微量金属和有毒元素的低成本氧化物LED

• 批准号: 15K05991
• 负责人: Nakamura Yusui
• 金额: $ 3.16万
• 依托单位: Kumamoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2015
• 资助国家: 日本
• 起止时间: 2015-04-01 至 2018-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15K05991/
• 关键词: 酸化物半導体; ミスト化学気相成長法; 発光ダイオード; 酸化亜鉛; ミストCVD; LED; ミストＣＶＤ

项目成果

Uniform ZnO epitaxial films formed at atmospheric pressure by high-speed rotation-type mist chemical vapor deposition

• DOI: 10.7567/apex.8.125502
• 发表时间: 2015-11
• 期刊: Applied Physics Express
• 影响因子: 2.3
• 作者: H. Tanoue;T. Taniguchi;S. Wada;Shinya Yamamoto;Shohei Nakamura;Y. Naka;H. Yoshikawa;Mizue Munekata;S. Nagaoka;Yusui Nakamura

Crystal Growth and Characterization of Undoped ZnO on m-plane Sapphire by Mist-CVD Technique with Different Carrier Gas Flow Rates

不同载气流量下雾气CVD技术在m面蓝宝石上生长未掺杂ZnO的晶体生长及表征

• 发表时间: 2015
• 作者: Hla Myo Tun;Thant Zin Win;Kensuke Minami;Satomi Teraya;Koushi Okita;Yusui Nakamura
• 通讯作者: Yusui Nakamura

Improvement of m-plane ZnO films formed on buffer layers on sapphire substrates by mist chemical vapor deposition

• DOI: 10.1002/pssa.201600603
• 发表时间: 2016-06
• 期刊: 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS)
• 作者: H. Tanoue;T. Yamashita;S. Wada;Zenji Yatabe;S. Nagaoka;Yusui Nakamura

Epitaxial Growth of Non-polar ZnS on Sapphire Substrate by Mist Chemical Vapor Deposition

雾气化学气相沉积法在蓝宝石衬底上外延生长非极性ZnS

• 发表时间: 2017
• 作者: Koshi Okita;Taiki Goto;Yudai Tanaka;Masato Takenouchi;Zenji Yatabe and Yusui Nakamura
• 通讯作者: Zenji Yatabe and Yusui Nakamura

Structural characteristics of a non-polar ZnS layer on a ZnO buffer layer formed on a sapphire substrate by mist chemical vapor deposition

雾气化学气相沉积法在蓝宝石衬底上形成ZnO缓冲层上非极性ZnS层的结构特征

• 发表时间: 2018
• 期刊: Japanese Journal of Applied Physics
• 影响因子: 1.5
• 作者: Koshi Okita;Katsuhiko Inaba;Zenji Yatabe;and Yusui Nakamura
• 通讯作者: and Yusui Nakamura