A Study on the Displacement Calibration System for Nano-meter Region

纳米区位移标定系统的研究

• 批准号: 09650127
• 负责人: OKUYAMA Eiki
• 金额: $ 1.92万
• 依托单位: Akita University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650127/
• 关键词: displacement calibration; nano-meter region; STM; ナノ・メータ; サブ・ナノ・メータ; 変位較正システム; 結晶格子; ノッチ型ヒンジ

The reliable displacement calibration method that can realize sub-nano-meter order accuracy is only the displacement calibration system using X-ray interfelometer with silicon lattice as the displacement standard. However, the system has some problems, for example, the system is large, expensive and it can not rapid calibrate, These problems are caused by X-ray interfelometer. When STM is used instead of X-ray interfelometer, these problems will be solved. The purpose of this study is to develop a novel compact displacement calibration system with sub-nano-meter order accuracy.At the first, STM for micro displacement calibration system was developed, As the result of the experiments, it is clear that the position of the probe should be control within 6 to 9 nm to detect the tonneling current. The next, an inch-worm style positioning system for STM is developed. It can move within sub-micro-meter order resolution. A displacement x-stage using elastic defomation hinges for nano-meter region is developed. The influence of the noise and that of the vibration is within nano-meter order. The feature of the displacement stage using a hinge is calculated to maximize the natural frequency. The calculated profile are step style and rectangular one. The influence of the heat to the nano-control stage is calculated using the FEM.

实现亚纳米级精度的可靠的位移标定方法只有以硅点阵X射线干涉仪为位移标准的位移标定系统。但是，由于X射线干涉仪的存在，该系统存在着体积大、价格昂贵、不能快速标定等问题。当用STM代替X射线干涉仪时，这些问题将得到解决。本研究的目的是研制一种新型的亚纳米级位移校准系统，首先研制了用于微位移校准的STM，通过实验确定了测量电流的探针位置应控制在6 ~ 9 nm范围内。其次，研制了一种用于STM的寸蜗杆式定位系统。它可以在亚微米量级的分辨率内移动。研制了一种用于纳米级的弹性变形铰链位移x工作台。噪声和振动的影响在纳米量级。计算了采用铰链的位移台的特性，使其固有频率最大化。计算出的截面形状有阶梯形和矩形两种。利用有限元法计算了热对纳米级工作台的影响。