Study for the Radial Motion Measurement Using the Atom Chase Method in Nano-meter Range

纳米级原子追踪法径向运动测量研究

• 批准号: 11650114
• 负责人: OKUYAMA Eiki
• 金额: $ 2.11万
• 依托单位: Akita University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650114/
• 关键词: radial motion; STM; nano-meter; inverse filtering; inverse matrix

The purpose of this research is to develop a novel compact system that can measure the radial motion with high accuracy.In this system, a table rotates around an axis slowly, just like a roundness measurement system. A lattice is placed near the center of the table and an atom near the center of the rotation axis is chased by a STM.At first, the STM to chase the motion of the atom was made. The next, 3-point method to measure the radial motion was developed.The Summary is as follows ;1. The STM was made and the sample lattice was measured. The system can measure the surface profile with sub-nano-meter order.2. The novel 3-point method with the weighting addition and the inverse filtering for the radial motion measurement was proposed.3. The novel 3-point method with the inverse matrix method for the roundness and the radial motion measurement was proposed.4. Useful range of the cross-correlation to define the sensor setting angle of 3-pont method was shown.

本研究的目的是开发一种新型的紧凑型径向运动测量系统，在该系统中，工作台围绕一个轴缓慢旋转，就像一个圆度测量系统。在工作台的中心附近放置一个格子，STM跟踪一个靠近旋转轴中心的原子。其次，提出了三点法测量径向运动的方法。制作了扫描隧道显微镜（STM），测量了样品的晶格结构。该系统可实现亚纳米量级的表面形貌测量.提出了一种新的三点法--加权相加和逆滤波法测量径向运动.提出了基于逆矩阵法的圆度和径向运动测量三点法.给出了互相关函数在确定三蓬特法传感器安装角时的适用范围。

项目成果

Eiki OKUYAMA: "The Roundness Measurement and the Radial Motion Measurement Based on the 3-point Method Using the Inverse Filtering"Proceedings of SPIE. Vol.4222. 427-431 (2000)

Eiki OKUYAMA：“使用逆滤波的基于三点法的圆度测量和径向运动测量”SPIE 论文集。

奥山栄樹: "3点法におけるセンサ位置算出に関する研究"精密工学会東北支部学術講演会講演論文集. 61-62 (2000)

Eiki Okuyama：“使用三点法计算传感器位置的研究”日本精密工程学会东北分会学术会议记录61-62（2000）。

Eiki OKUYAMA: "Inverse Matrix Method for the Roundness Measurement and the Radial Motion measurement based on the 3-point Method"Journal of JSPE. (Now, on Publishing).

Eiki OKUYAMA：“基于三点法的圆度测量和径向运动测量的逆矩阵法”JSPE 杂志。

EiKi OKDYAMA: "The Roundness Measurement and the Radial Motion Measurement Based on the 3-point Method Vsing the Inverse Filtering"Proceedings of SPIE. Vol.4222. 427-431 (2000)

EiKi OKDYAMA：“基于三点法与逆滤波的圆度测量和径向运动测量”SPIE 论文集。

奥山栄樹: "真円度形状測定と軸の回転精度測定のための3点法への逆行列法の適用について"精密工学会誌. 掲載待ち.

奥山秀树：“关于逆矩阵法在测量轴的圆度和旋转精度的三点法中的应用”，日本精密工程学会杂志待出版。