THE CREATION RESEARCH OF SUB NANOMETER MACHINING SYSTEM OF MAGNETISM, ELECTRON AND OPTICAL COMPONENT GLASS AND MULTIPURPOSE MACHINE TOOL

在磁性、电子和光学玻璃部件中大量使用的玻璃的机械加工精度，要求加工表面的粗糙度为埃量级，平面度为0.1μm/φ100或以下。本研究的目的不是停留在单纯精度试验的生产改进目标上，而是考察了加工能量的降低和加工过程的减少、加工液循环再生系统的构建、洁净室等与加工环境空间最小化的关联设施，并考虑了全局环境负荷的减轻。首先，为了弄清测试玻璃的力学性能，进行了空气中和扫描电子显微镜下的微划痕实验。结果，澄清了几种类型玻璃上划痕的临界深度。在此基础上，利用研制的多功能机床对几种试验玻璃进行了超精密磨削试验，获得了亚纳米量级的超光滑加工表面。研究了加工参数与微裂纹的关系，并建立了特定类型玻璃的脆性-延性磨削转变。此外，将最近的磨削结果与作者以前工作的金刚石压痕-划痕实验结果进行了比较，结果表明，磨削的临界深度是压痕临界深度的6倍左右，是划痕临界深度的7倍左右。阐述了利用研制的多用途机床，不使用研磨抛光机，实现了从粗加工到超精加工。

The machine finish accuracy of the glass used abundantly in magnetism, electron and optical glass components, roughness of finished surface of angstrom order and 0.1μm/φ100 or less of flatness are required. The purpose of this study did not remain in productive improvement goal of mere accuracy experiment, and it is examined including the energy reduction of processing and the relation facility of minimizing of machining environment space such as reduction of the machining process, construction of circulation regeneration system of machining fluid, clean room, etc., and global environmental load off is considered. At the beginning to clarify the mechanical property of test glasses, micro indentation-scratching experiments in the air and in a SEM are conducted. As a result, critical depths of scratching on several types of glasses are clarified . In continuing, ultra-precision grinding experiments have been conducted on several types of test glasses by using developed multipurpose machine tool, and super smooth finished surfaces in sub nanometer order are obtained. The relationship between machining parameters and microcracks was examined and brittle to ductile grinding transition has been established for a given types of glasses, as well. Besides, a comparison of the recent grinding results and a results of diamond indentation-scratching experiments of previous work done by the authors has shown that the critical depth in grinding is thereabouts six times bigger than the critical depth in indentation and seven times than in scratching. It is clarified that by using developed multipurpose machine tool, from rough processing to the super-finishing is realized without using lapping and polishing machine.