DEVELOPMENT OF MICRO PROCESS AND MICRO FABRICATION SYSTEM AND EXPERIMENT UNDER SCANNING ELECTRON MICROSCOPE

在精密、医学和生物工程的应用中，越来越需要在微米或亚微米尺度上实现制造、组装、检测、修改和/或评估。在这样的操作中，操作者必须经历长时间的训练以熟悉微尺度运动的感觉，以实现高重复性和高精度。然而，这些操作是繁琐和耗时的。因此，强烈期望开发一种操作系统，使不熟练的操作员能够容易地执行所需的任务。该项目的最终目标是开发一种操作系统，使不熟练的操作员能够在扫描电子显微镜中处理微米或亚微米尺寸的物体，就像处理通常尺寸的物体一样容易。本报告介绍了在概念设计、样机研制和可操作性评估方面取得的成果。该系统模块化为操作单元、控制单元和人机界面。操作单元还包括安装在旋转工作台上的双臂操作器和样品台，样品台具有沿沿着X、Y和Z方向线性和绕Z轴旋转的四个自由度。机械手由带有放大元件的PZT致动器驱动。操作员不进行直接操作，而是通过用户友好的界面操纵机械手，该界面旨在吸收光学和机械变化。它允许操作者集中注意力进行操作，而无需过多关注SEM放大倍数或其他条件的变化。控制单元合并SEM的视觉信息和来自用户界面的操纵信息，并导出用于所需操作的臂的最佳运动。

In the applications of precision, medical and biological engineering, there are increasing demands of implementing fabrication, assemble, inspection, modification and/or evaluation at the micron or sub-micron scale. In such operations, the operators have to experience a long time training to familiarize the feeling of micro-scale movements in order to achieve high repeatability and high accuracy. Yet, the operations are tedious and time consuming. It is, therefore, strongly expected to develop a manipulation system possible for unskilled operators to easily execute the desired tasks. The ultimate goal of this project is to develop a manipulation system enabling unskilled operators to deal with objects of micron or sub-micron size in a scanning electron microscope, as easily as to deal with objects in usual size. Described in this report is the results achieved on the conceptual design, the prototype development and the operability evaluation. The system is modularized into the manipulation unit, the control unit and the man-machine interface. The manipulation unit is further comprised of a twin-arm manipulator mounted on a rotary table and a specimen stage with four degrees of freedom linear along X, Y and Z direction, and rotational around the Z-axis. The manipulator is driven by PZT actuators with magnifier elements. Instead of doing a direct operation, the operator steers the manipulator via an user-friendly interface which is designed to absorb the optical and mechanical variations. It allows the operator to concentrate to the manipulation without paying mach attentions to the changes in magnification of SEM or other conditions. The control unit merges the visual information of the SEM and the manipulation information from the user interface and derives the optimum locomotion of the arm for the desired operation.