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STUDY ON MECHANISM OF CLUSTER FORMATION THROUGH ELECTRONIC SPUTTERING INDUCED BY SWIFT HEAVY IONS

快重离子电子溅射团簇形成机理研究

基本信息

批准号：
09480099
负责人：
IMANISHI Nobutsugu
金额：
$ 2.5万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09480099/
关键词：
Electronic Sputtering Heavy Ion Beam Cluster Ion Multiple Monoatomic Ion Emission Yield Emission Energy Time of Flight Measurement Irradiation Effect 単原子多価イオン 2次イオン初期エネルギー放出角度分布

项目摘要

The yield and emission energy distribution of secondary ions have been systematically measured for Al Si AlィイD22ィエD2OィイD23ィエD2 and SiOィイD22ィエD2 bombarded by Si, Cu and Ag ions at an impact energy region of MeV, where the electronic stopping power dominates over the nuclear stopping power. Singly charged cluster ions as well as multiply charged monatomic ions were observed in the case of the insulator targets. Dominant species of the cluster ions were Si(SiOィイD22ィエD2)ィイD1+ィエD1ィイD2xィエD2 and SiO(SiOィイD22ィエD2)ィイD1+ィエD1ィイD2xィエD2 (x is an integer )for SiOィイD22ィエD2 and (AlィイD22ィエD2OィイD23ィエD2)ィイD1+ィエD1ィイD2xィエD2, AlO(AlィイD22ィエD2OィイD23ィエD2)ィイD1+ィエD1ィイD2xィエD2and AlィイD22ィエD2OィイD22ィエD2(AlィイD22ィエD2OィイD23ィエD2)ィイD1+ィエD1ィイD2xィエD2 for AlィイD22ィエD2OィイD23ィエD2. For the conductive targets only singly and multiply charged monatomic ions were observed. The obtained emission energy for atomic ions depends not only on projectiles but also on the electric charge q. The energy distribution of the atomic ions emitted from the conductive targets is asymmetric extending to a high-energy side and is rather high compared with that for the insulators. The energy distribution for cluster ions is very narrow compared with that for the atomic ions. The mean energy for the cluster ions hardly depends on the size of cluster. These results combined with the yield dependence on the electronic stopping power show that the atomic ions are produced from the hot track region through the sequential process of ionization and recoil caused by the projectiles and forced to move by the electric repulsive force. The cluster ions are formed in the periphery of the track region.

本文系统地测量了Si、Cu和Ag离子在MeV能量范围内轰击Al Si Al Al_2O_3 D_22、Si Al Al_2O_3 D_23、Si Al Al_2O_3 D_22、Si Si Al Al_2O_3 D_22、Si Si Al Al_2O_3 D_23 D_2时的二次离子产额和发射能量分布。在绝缘体靶的情况下，观察到单电荷团簇离子和多电荷单原子离子。团簇离子的主要种类为Si（SiO ↓ [2] O ↓ [2] D ↓ [2]）O ↓ [1] O ↓ [2] O ↓ [（SiO_2）_2O_3 D_22（SiO_2）_2O_3 D_1 + SiO_2 D_1（SiO_2）_2O_3 D_2x（SiO_2）_2O_3 D_2（x是整数），对于SiO ↓ [2] D ↓ [22] D ↓ [2]，（Al 22O3）D23（Al 22O3）D23（Al 22O3）D2（Al 22O3）D2（Al 22O3）AlO（Al Al2O3 D22 Al2O3 D23 Al2O3 D2）Al2O3 D1+ Al2O3 D1 Al2O3 D2x Al2O3 D2和Al Al2O3 D22 Al2O3 D22 Al2O3 D2（Al Al2O3 D23 Al2O3 D2）Al2O3 D1+ Al2O3 D1 Al2O3 D2x Al2O3 D2。对于导电目标，仅观察到单电荷和多电荷的单原子离子。所得到的原子离子的发射能量不仅取决于射弹，而且还取决于电荷q。从导电靶发射的原子离子的能量分布是不对称的，延伸到高能量侧，并且与绝缘体相比相当高。团簇离子的能量分布比原子离子的能量分布窄。团簇离子的平均能量与团簇的大小关系不大。结合产率对电子阻止本领的依赖关系，这些结果表明，原子离子是从热径迹区通过电离和反冲的顺序过程产生的弹丸和被迫移动的电斥力。在轨道区域的周边形成团簇离子。