Study on Ultra-Precision Grinding of Micro Aspherical Molding Dies for Optical Transmission Devices

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In this study, a new grinding method and a grinding system with the inclined rotational axis of micro grinding wheel were developed. The wheel was formed to a precise columnar shape of 0.8 mm in the diameter by a single crystal diamond truer on the machine. By the developed system, in grinding test of the workpiece of about 0.7 mm radius curvature, the form accuracy of about 0.1 mum P-V and surface roughness of less than 0.03 mum Ry were obtained.Recent trend is the further micronization of aspherical optical components. Therefore further micronizing of aspherical surface was examined by the ultra-high speed grinding spindle of 15 * 104 rpm at the maximum rotational rate and micro wheel of about 0.3 mm in radius curvature. In the grinding test, WO (tungsten carbide) molding die of less than 0.3 mm radius curvature was tested and the form accuracy of about 0.1 mum P-V was obtained.Finally, the effects of the wheel radius error and the wheel positioning errors (horizontal and vertical directions) on the workpiece form accuracies are simulated and its compensation methods are discussed. And in the aspherical grinding tests, the grinding examples of tungsten carbide by using a proposed compensation methods are examined. From the experiments, it was clarified that the proposed compensation methods are useful.