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Studies on ceramics micro machining with minute-size diamond quill

微小尺寸金刚石套筒陶瓷微加工研究

基本信息

批准号：
02650083
负责人：
SYOJI Katsuo
金额：
$ 1.28万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650083/
关键词：
diamond wheel minute-size quill groove grinding cutting profiling micro router ceramics high speed rotation マイクロ加工微小径砥石ダイヤモンド砥石

项目摘要

Mechatronic products tend rapidly toward integration and smallization in recent years, so that micro machining has become one of the most important subjects. Especially, main parts are usually made of hard-brittle materials such as ceramics. Because these materials are difficult to process with general physical or chemical method, they are ground mainly using diamond wheels. The objects of this research are to develop a machine for micro grinding by using a minute-size diamond quill and to eam fundamental data of the micro grinding.In order to obtain a standard grinding speed on a quill of which diameter is below 1 nim, the spindle is required of rotational speed more than 100, 000rpm. Other problems in this micro grinding are breakage and elastic deformation of the quill. Based on the above concepts, a grinding machine was newly designed and produced. This machine was equipped with a high frequency spindle of 120, 000rpm in max., and was constructed of areo-static gasbearing, a dynamometer for monitoring the grinding force and a X-Y stage driven by an AC servo motor.Through grinding ceramics on this machine, the following results were obtained.(1)The grinding forces depend upon the wheel speed, the faster spindle speed in the range to 120, 000rpm leading to the lower grinding force.(2)The grinding forces increase simply with increasing workpiece feed speed, so that they can be controlled by operating the feed speed.(3)The grinding forces increase proportionally to grinding length, and those increasing rates decrease with increasing diamond-grit size of quill.(4)Adding vibration to the workpiece vertically to the cut groove reduces the grinding force notably.

近年来，机电一体化产品的集成化、小型化趋势日益明显，微细加工已成为机电一体化的重要研究方向之一。特别是，主要部件通常由硬脆材料如陶瓷制成。由于这些材料很难用一般的物理或化学方法加工，因此主要采用金刚石砂轮进行研磨。本研究的目的是研制一台使用微细金刚石主轴的微细磨削机床，并获得微细磨削的基本数据，对于直径小于1 mm的主轴，要获得标准的磨削速度，主轴转速必须大于100000转/分。在这种微研磨中的其它问题是主轴的断裂和弹性变形。基于上述理念，设计并制造了一台磨床。本机配备了最高120，000 rpm的高频主轴，研制了一台由气体静压轴承、测力仪和交流伺服电机驱动的X-Y工作台组成的陶瓷磨削试验机，并进行了陶瓷磨削试验。（1）磨削力取决于砂轮转速，主轴转速在120，000 rpm范围内越高，磨削力越低。（2）磨削力仅随工件进给速度的增加而增加，因此可以通过控制进给速度来控制磨削力。（3）磨削力随磨削长度的增加而增加，随主轴金刚石粒度的增加而减小。（4）垂直于切削槽向工件施加振动显著降低了磨削力。