DEVELOPMENT ON HIGH-ACCURACY FABRICATION TECHNOLOGY OF ASPHERIC OPTICAL COMPONENTS USING THE PARALLEL GRINDING METHOD

平行磨削法高精度非球面光学元件制造技术开发

• 批准号: 13555031
• 负责人: SYOJI Katsuo
• 金额: $ 8.77万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555031/
• 关键词: ASPHERICAL MACHINING; ASPHERICAL LENSES; COMPENSATION GRINDING; ON-MACHINE FORM MEASUREMENT; PARALLEL GRINDING; DIAMOND WHEELS; ULTRA-PRECISION GRINDING

Development of the manufacturing technology for high-accuracy convex aspheric glass lenses: The objective of this sub-project was to fabricate the convex aspheric lens made of glass, 20〜150mm in diameter, having a form accuracy of 100 nm and a surface roughness of lOnm. This kind of lens is used in the optical systems such as data projector. The main results are listed as follows: (1) The ultraprecision aspheric grinder AHN60-3D, produced by the Toyada Machine Co., Ltd. was renovated for the use of the parallel grinding method. (2) The software, which is able to generate the NC codes from the aspheric equations according to the parallel method, was developed. (3) Based on the traditional CG (Curve Generating) method, high-accuracy truing technology far spherical wheels was developed, and it has become possible to contour the spherical diamond wheel, 75mm in diameter, SD600〜SD5000 in mesh number to an form accuracy of 1 micrometer. (4) The diamond wheel for ultraprecision grindinof asph … More eric glass lenses were developed by changing the material properly of the resin bind, filler type and blowing agent etc.. As a result, 30nmRy surface roughness and 100 nm form accuracy were realized in Use final grinding experiments. This provides the possibility of obtaining ultraprecision aspheric surface on glass without polishing. (5) The grinding experiment of the 150mm-diameter aspheric glass lens was performed. It was proved that, using the parallel grinding method, the ultra-precision grinding is possible even for large radius lenses, since the grinding wheel wear during one grinding pass is as small as can be neglected.Development of the manufacturing technology for concave aspheric mold and micro aspheric mold made of cemented carbide: The objective of this sub-project was to produce the molds of aspheric lenses for CCD cameras and endoscopes. The main results are listed as fellows: (1) According to the minimum curvature radius of the micro aspheric surface to be ground, spherical resin-bond diamond wheels, 1mm in diameter, 600-3000 in mesh number, were designed and manufactured. (2) An on-machine truing method for micro spherical wheel was developed by utilizing a stainless steel pipe as the lap tool. A 1mm-ditmeter grinding wheel was successfully dressed to a spherical shape by using the above method. (3) Cemented carbide mold of aspheric lens for endoscopes applications were ground using the proposed method. 50mmRy surface roughness and 100 nm form accuracy were obtained on a 2mm-radius aspheric lens mold. (4) An on-machine measurement system having an air-micro-probe was designed and developed. The system can perform measurement at l0nm resolution and l0mm dynamic range. (5) Theoretical analysis and simulation of the error formation mechanism of the arc-truing device was carried out with considering the offset errors in X direction, Y direction and the wear of the grinding wheel. An error compensation method was developed. As a result, 100nm form accuracy was obtained. Less

高精度凸非球面玻璃透镜制造技术的发展：该项目的目标是制造直径20~150 mm的玻璃凸非球面透镜，其形状精度为100 nm，表面粗糙度为10 nm。这种透镜可用于数据投影仪等光学系统中。主要研究成果如下：(1)对日本丰田机械株式会社生产的AHN60-3D超精密非球面磨床进行了平行磨削改造。(2)开发了由非球面方程并行生成NC代码的软件。(3)在传统的曲线生成方法的基础上，开发了远球面砂轮的高精度整形技术，使直径75 mm、网目数SD600~SD5000的球面金刚石砂轮的成形精度达到1微米。(4)ASPH…超精密磨削用金刚石砂轮通过适当改变树脂粘结剂、填料类型和发泡剂等材料，研制出了更多的ERIC玻璃透镜。在实际磨削实验中，获得了30nmRy的表面粗糙度和100 nm的成形精度。这为在玻璃上获得超精密非球面提供了不需要抛光的可能性。(5)对直径为150 mm的非球面玻璃透镜进行了磨削实验。实验证明，采用平行磨削的方法，即使是大半径的镜片也可以实现超精密磨削，因为一次磨削过程中砂轮的磨损量可以忽略不计。凹面非球面模具和硬质合金微非球面模具的制造技术的开发：本课题的目标是生产用于CCD相机和内窥镜的非球面镜片模具。主要研究成果如下：(1)根据待研微非球面的最小曲率半径，设计制造了直径1 mm、目数600-3000的球形树脂结合剂金刚石砂轮。(2)开发了一种以不锈钢管为搭接工具的微球面砂轮在机整形方法。用该方法成功地将1 mm直径的砂轮修整成球面。(3)利用该方法对内窥镜用硬质合金非球面透镜模具进行了磨削加工。在半径为2 mm的非球面透镜模具上获得了50 mm的表面粗糙度和100 nm的成形精度。(4)设计并研制了空气微探头在机测量系统。该系统可在10 nm分辨率和10 mm动态范围内进行测量。(5)在考虑X、Y方向偏置误差和砂轮磨损的情况下，对弧形修整装置的误差形成机理进行了理论分析和仿真。提出了一种误差补偿方法。结果达到了100 nm的成形精度。较少

项目成果

佐伯 優, 厨川常元, 庄司克彦: "パラレル研削法による非球面金型加工に関する研究"精密工学会誌. 68,8. 1067-1071 (2002)

Masaru Saeki、Tsunemoto Kuriyakawa、Katsuhiko Shoji：“使用平行磨削方法的非球面模具加工研究”日本精密工程学会杂志 68，8（2002）。

吉原信人, 厨川常元, 庄司克雄: "軸対象非球面研削における研削表面のナノトポグラフィー"2002年度砥粒加工学会学術講演会論文集. B42 (2002)

Nobuto Yoshihara、Tsunemoto Kuriyakawa、Katsuo Shoji：“轴对称非球面磨削中的磨削表面的纳米形貌”日本磨料加工学会 2002 年学术会议记录 B42 (2002)。

厨川常元: "極微粒ダイヤモンドホイール用ツルア砥石の開発(第1報,鏡面研削加工のための精密ツルーイング・ドレッシングに関する研究)"砥粒加工学会誌. 46,8. 240-244 (2002)

Tsunemoto Kuriyakawa：“超细金刚石砂轮的真正砂轮的开发（第一份报告，镜面磨削的精密修整和修整研究）”日本磨料加工学会杂志 46,8 (2002)。

T.Kuriyagawa et al.: "Micro Truing/Dressing for Small-Sized Aspherical Mirror Grinding"Advances in Abrasive Technology.. 4. 111-114. (2001)

T.Kuriyakawa 等人：“小型非球面镜面磨削的微修整/修整”磨料技术进展.. 4. 111-114。

M.Saeki, J.Lee, T.Kuriyagawa, K.Syoji: "Machining of Aspherical Opto-Device utilizing Parallel Grinding Method"Proc. of the 16th ASPE Annual Meeting. 433-436 (2001)

M.Saeki、J.Lee、T.Kuriyakawa、K.Syoji：“利用平行磨削方法加工非球面光学器件”Proc。