Practical operational use of higher order polynomials in reducing the linearity errors of nanopositioning stages

高阶多项式在减少纳米定位台线性误差方面的实际操作使用

• 批准号: 10039395
• 金额: $ 2.1万
• 依托单位: PRIOR SCIENTIFIC INSTRUMENTS LIMITED
• 依托单位国家: 英国
• 项目类别: Collaborative R&D
• 财政年份: 2022
• 资助国家: 英国
• 起止时间: 2022 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=10039395
• 关键词: Practical; operational; use; higher; order

Prior Scientific are looking for an innovative solution which allows Queensgate nanopositioning stages to continue to meet the increasing demands for semiconductor, hard disc testing and atomic force microscopy which are anticipated to routinely require low-picometre accuracies.The project proposed will develop and test higher-order automatic linearity compensation for on-axis stage calibration. A new algorithm will be developed which can be applied to existing stages, together with appropriate calibration methods. To maintain production efficiency, there must be minimum additional overhead for test and measurement with these methods. It is anticipated that this will allow us to produce precision stages with the highest linearity in the industry whilst maintaining high yields, reducing re-work and maintaining manufacturing costs.

Prior Scientific正在寻找一种创新的解决方案，使Queensgate纳米定位平台能够继续满足半导体、硬盘测试和原子力显微镜日益增长的需求，这些需求预计通常需要低皮米精度。该项目将开发和测试用于轴上平台校准的高阶自动线性补偿。将开发一种新的算法，可应用于现有的阶段，以及适当的校准方法。为了保持生产效率，必须有最小的额外开销的测试和测量这些方法。预计这将使我们能够生产具有业内最高线性度的精密平台，同时保持高产量，减少返工并保持制造成本。