Practical operational use of higher order polynomials in reducing the linearity errors of nanopositioning stages

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Prior Scientific are looking for an innovative solution which allows Queensgate nanopositioning stages to continue to meet the increasing demands for semiconductor, hard disc testing and atomic force microscopy which are anticipated to routinely require low-picometre accuracies.The project proposed will develop and test higher-order automatic linearity compensation for on-axis stage calibration. A new algorithm will be developed which can be applied to existing stages, together with appropriate calibration methods. To maintain production efficiency, there must be minimum additional overhead for test and measurement with these methods. It is anticipated that this will allow us to produce precision stages with the highest linearity in the industry whilst maintaining high yields, reducing re-work and maintaining manufacturing costs.