Practical operational use of higher order polynomials in reducing the linearity errors of nanopositioning stages

Prior Scientific正在寻找一种创新的解决方案，使Queensgate纳米定位平台能够继续满足半导体，硬盘测试和原子力显微镜日益增长的需求，这些要求通常需要低皮米精度。提出的项目将开发和测试用于轴上平台校准的高阶自动线性补偿。将开发一种新的算法，可以应用于现有的阶段，以及适当的校准方法。为了保持生产效率，必须将使用这些方法进行测试和测量的额外开销降到最低。预计这将使我们能够生产出业内线性度最高的精密工作台，同时保持高产量，减少返工并保持制造成本。

Prior Scientific are looking for an innovative solution which allows Queensgate nanopositioning stages to continue to meet the increasing demands for semiconductor, hard disc testing and atomic force microscopy which are anticipated to routinely require low-picometre accuracies.The project proposed will develop and test higher-order automatic linearity compensation for on-axis stage calibration. A new algorithm will be developed which can be applied to existing stages, together with appropriate calibration methods. To maintain production efficiency, there must be minimum additional overhead for test and measurement with these methods. It is anticipated that this will allow us to produce precision stages with the highest linearity in the industry whilst maintaining high yields, reducing re-work and maintaining manufacturing costs.