Gas Adsorption Ellipsometer for Thin Film Characterisation

用于薄膜表征的气体吸附椭圆仪

• 批准号: 710673
• 金额: $ 12.74万
• 依托单位: SURFACE MEASUREMENT SYSTEMS LIMITED
• 依托单位国家: 英国
• 项目类别: GRD Proof of Concept
• 财政年份: 2015
• 资助国家: 英国
• 起止时间: 2015 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=710673
• 关键词: Gas; Adsorption; Ellipsometer; Thin; Film

One of the most important methods currently available for characterising the surfaceproperties of powders and porous materials is their ‘Brunauer–Emmett–Teller’ (BET) surfacearea which is determined using a gas adsorption isotherms, normally using nitrogen [1]. Suchisotherms also provide key information on the pore structure, surface chemistry andmorphology of powders. So utilitarian has become this laboratory technique that there areprobably worldwide over 50,000 of these BET instruments in daily laboratory operation.However, these systems cannot be used to study monolithic thin film samples. Thecharacterisation of such thin films is an area of increasing importance for semi-conductor,nano-porous films, graphene, catalysts and photo-voltaic materials to name but a fewimportant industrial applications. The ability to study the surface properties and structures ofthese classes of materials is key to both their development and their future commercialisation.This project will evaluate the technical feasibility of determining gas and vapour adsorptionisotherms on thin film substrates with surface areas of only a few square millimetres using anovel ellipsometric adsorption instrument. This instrument would allow a range of surfaceproperties of monolithic thin films to be determined for the first time routinely includingsurface area, surface energy, surface heterogeneity, surface diffusion, surface reactivity andsurface porosity. Such property measurements are key to the development of many classes ofnew nano-structured thin film materials.Such a successful development would offer the scope of commercialising AdsorptionEllipsometer as a major new research tool for the development of thin film materials.

目前可用于表征粉末和多孔材料表面性质的最重要方法之一是它们的“Brunauer-Emmett-Teller”（BET）表面积，其使用气体吸附等温线测定，通常使用氮气[1]。这些等温线也提供了有关粉末的孔结构、表面化学和形态的关键信息。这种实验室技术已经变得如此实用，以至于全世界可能有超过50，000台这样的BET仪器用于日常实验室操作。然而，这些系统不能用于研究单片薄膜样品。这种薄膜的特性对于半导体、纳米多孔膜、石墨烯、催化剂和光伏材料（仅举几个重要的工业应用）来说是一个越来越重要的领域。研究这些材料的表面性质和结构的能力是它们的发展和未来商业化的关键。本项目将评估使用新型椭圆偏振吸附仪测定表面积仅为几平方毫米的薄膜基底上的气体和蒸汽吸附等温线的技术可行性。该仪器将允许一系列的表面性能的单片薄膜首次被确定为常规包括表面积，表面能，表面异质性，表面扩散，表面反应性和表面孔隙率。这种性质的测量是许多新的纳米结构薄膜材料的发展的关键。这种成功的发展将提供商业化的范围吸附椭偏仪作为一个主要的新的研究工具，为薄膜材料的发展。