APPLICATION OF A POST-COLUMN ENERGY FILTER

一种先进的柱后能量滤光器正在进行光谱评估 在200keV的透射电子显微镜上成像。过滤器是 配备了一系列四重和六重镜头和 耦合的、冷却的、慢扫描的CCD摄像机，已被证明具有 入射通量越大，量子探测效率越接近单位 每个像素有10个快电子。成像滤光片的这种性能 使高质量的元素地图能够从核心边缘记录下来 在100 eV到500 eV的范围内，包括磷、硫和 氮气。它还表明，包含10/8 FAST的光谱 可以获取每个通道的电子数，对应于计数 统计在0.01%的水平上。这种过滤器有望降低钙含量。 检测下限低于目前使用光电二极管阵列可实现的下限 探测器。成像滤光片也被用来记录零损耗 冷冻蚀刻细胞结构复制品的数字显微照片 增强了对比度。

An advanced post-column energy filter is being assessed for spectroscopic imaging on a 200-keV transmission electron microscope. The filter is equipped with a series of quadruple and sextuple lenses and a YAG-coupled, cooled, slow-scan CCD camera, which has been shown to have a detective quantum efficiency close to unity for incident fluxes greater than 10 fast electrons per pixel. This performance of the imaging filter has enabled high-quality elemental maps to be recorded from core-edges in the range from 100eV to 500eV, including phosphorus, sulfur, and nitrogen. It has also been shown that spectra containing 10/8 fast electrons per channel can be acquired, corresponding to counting statistics at the 0.01% level. This filter is expected to reduce calcium detection limits below those currently achievable with a photodiode array detector. The imaging filter has also been used to record zero-loss digital micrographs of freeze-etch replicas of cellular structures with enhanced contrast.