Development and commercialisation of a novel parallel magnetic analyser for surface studies

用于表面研究的新型并行磁力分析仪的开发和商业化

• 批准号: EP/H00825X/1
• 负责人: Mohamed El-Gomati
• 金额: $ 14.53万
• 依托单位: University of York
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2009
• 资助国家: 英国
• 起止时间: 2009 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FH00825X%2F1
• 关键词: Development; commercialisation; novel; parallel; magnetic

This project aims to bring to commercialisation a new electron energy analyser that can acquire full spectra of the surfaces of investigated samples. The unique feature of this invention is that data acquisition will be carried out in parallel and over a wide angular range. This offers an improvement on current technology approaching two orders of magnitude in terms of speed of data acquisition. In addition, the new invention favourably compares with present technology on cost and suitability to sample environment as found in conventional electron mcroscopes. The principal market for the new analyser is in defect review in semiconductor manufacturing but other areas across nanotechnology where elemental analysis of small dimensions is required will also benefit from this development. This is because as semiconductor device sizes become ever smaller, so do the size of undesired particles that can prevent the operation of the manufactured product. In order to assist in detecting the presence of small particles and to gain an understanding as to what causes their presence during the manufacturing process, it is vital to be able to determine the chemical composition of those particles. Current methods of carrying out this task are incapable of coping with the nanometre size of particles that cause major problems today when such a process is carried out in a conventional electron microscope. The investigators of this proposal intend to further optimise the present invention to suit demonstration to potential scientific instrument manufacturers who could be interested in licensing this technology . The investigators have identified a list of such world-leading manufacturers who will be visited and presented with representative results from the current set-up and those interested in further discussion leading to licensing of the technology will be invited to York for a demonstration. Finally, the investigators will work closely with a leading British electron microscope manufacturer to adapt the new invention on one of their SEMs. Obducat Camscan will make available one of their latest microscope models, the Apollo 300, to demonstrate the new invention.

该项目旨在将一种新的电子能量分析仪商业化，该分析仪可以获得所研究样品的表面的完整光谱。本发明的独特之处在于，数据采集将在一个很宽的角度范围内并行进行。这在数据采集速度方面比目前的技术有了近两个数量级的改进。此外，新发明与现有技术相比，在成本和对常规电子显微镜的采样环境的适应性方面具有优势。新分析仪的主要市场是半导体制造领域的缺陷审查，但纳米技术中需要进行小尺寸元素分析的其他领域也将受益于这一发展。这是因为随着半导体器件的尺寸变得越来越小，可能会阻止制造产品运行的不需要的颗粒的尺寸也会变小。为了帮助检测小颗粒的存在，并了解制造过程中它们存在的原因，能够确定这些颗粒的化学成分是至关重要的。目前进行这项任务的方法不能处理纳米尺寸的颗粒，而当这样的过程在传统的电子显微镜中进行时，这些颗粒在今天会造成重大问题。这项提案的研究人员打算进一步优化本发明，以适应潜在的科学仪器制造商的演示，这些制造商可能有兴趣许可这项技术。调查人员已经确定了这样一份世界领先制造商的名单，这些制造商将被访问并展示当前设置的具有代表性的结果，那些对导致技术许可的进一步讨论感兴趣的人将被邀请到约克进行演示。最后，研究人员将与英国一家领先的电子显微镜制造商密切合作，将这项新发明应用于他们的一台扫描电子显微镜。OBDUCAT Camcan将推出他们最新的显微镜型号之一--阿波罗300，以展示这项新发明。

项目成果

A parallel acquisition charged particle energy analyser using a magnetic field

使用磁场的并行采集带电粒子能量分析仪

• DOI: 10.1002/sia.6055
• 发表时间: 2016
• 期刊: Surface and Interface Analysis
• 影响因子: 1.7
• 作者: Walker C