A COMPACT, FAST, PARALLEL, MAGNETICALLY BASED ELECTRON ENERGY ANALYSER FOR SURFACE STUDIES

电子设备的制造是复杂的，并且如同在任何工业过程中一样，质量控制是重要的问题。造成集成电路缺陷的众多原因之一是存在不需要的小颗粒。为了帮助质量控制，使用扫描电子显微镜（SEM）并分析来自样品的X射线来确定颗粒的组成。然而，这种方法不能用于非常小的颗粒，因为X射线来自比颗粒尺寸大得多的体积。随着电子设备上特征的尺寸减小，因此可以破坏该芯片的操作的颗粒的尺寸也减小。俄歇电子（而不是X射线）可以用来确定更小粒子的组成。然而，这种方法传统上速度较慢，并且难以与SEM内的磁场一起工作。这项研究的目的是开发一种新的和更快的电子能量分析仪（EEA），它也将在中等磁场的存在下工作。一个快速和紧凑的EEA也将允许其他小结构，包括生物材料和聚合物，以及在执行动态实验的组成测定。

The manufacture of electron devices is complicated and, as in any industrial process, quality control is an important issue. One of the many causes foi defective integrated circuits is the presence of unwanted small particles. In order to assist with quality control the composition of the particles is determined using a scanning electron microscope (SEM) and analysing the X-rays coming from the sample. However, this method cannot be used on the very small particles since the X-rays come from a much larger volume than the size of the particles. As the size of the features on electron devices reduce, so the size of particles that can destroy the operation of that chip also reduce. Auger electrons (instead of X-rays) can be used to determine th composition of much smaller particles. However, this method is traditionally slow and is difficult to work with the magnetic fields within the SEM. This research is intended to develop a new and much faster electron energy analyser (EEA) which will also operate in the presence of moderate magnetic fields. A fast and compact EEA will also allow the composition determination of other small structures including biological materials and polymers as well as in performing dynamic experiments.