A COMPACT, FAST, PARALLEL, MAGNETICALLY BASED ELECTRON ENERGY ANALYSER FOR SURFACE STUDIES

用于表面研究的紧凑、快速、并行、基于磁的电子能量分析仪

• 批准号: EP/C53087X/1
• 负责人: Mohamed El-Gomati
• 金额: $ 31.77万
• 依托单位: University of York
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2006
• 资助国家: 英国
• 起止时间: 2006 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FC53087X%2F1
• 关键词: COMPACT; FAST; PARALLEL; MAGNETICALLY; BASED

The manufacture of electron devices is complicated and, as in any industrial process, quality control is an important issue. One of the many causes foi defective integrated circuits is the presence of unwanted small particles. In order to assist with quality control the composition of the particles is determined using a scanning electron microscope (SEM) and analysing the X-rays coming from the sample. However, this method cannot be used on the very small particles since the X-rays come from a much larger volume than the size of the particles. As the size of the features on electron devices reduce, so the size of particles that can destroy the operation of that chip also reduce. Auger electrons (instead of X-rays) can be used to determine th composition of much smaller particles. However, this method is traditionally slow and is difficult to work with the magnetic fields within the SEM. This research is intended to develop a new and much faster electron energy analyser (EEA) which will also operate in the presence of moderate magnetic fields. A fast and compact EEA will also allow the composition determination of other small structures including biological materials and polymers as well as in performing dynamic experiments.

电子设备的制造是复杂的，正如在任何工业过程中一样，质量控制是一个重要的问题。集成电路有缺陷的众多原因之一是不需要的小颗粒的存在。为了协助质量控制，使用扫描电子显微镜(SEM)和分析来自样品的X射线来确定颗粒的组成。然而，这种方法不能用于非常小的粒子，因为X射线来自的体积比粒子的大小大得多。随着电子设备上的特征尺寸的减小，可以破坏芯片运行的粒子的尺寸也会减小。俄歇电子(而不是X射线)可以用来确定小得多的粒子的组成。然而，这种方法传统上是缓慢的，并且很难与扫描电子显微镜内的磁场一起工作。这项研究旨在开发一种新的、速度更快的电子能量分析仪(EEA)，它也将在中等磁场存在的情况下运行。快速和紧凑的EEA还将允许确定包括生物材料和聚合物在内的其他小结构的组成，以及进行动态实验。

项目成果

A parallel acquisition charged particle energy analyser using a magnetic field

使用磁场的并行采集带电粒子能量分析仪

• DOI: 10.1002/sia.6055
• 发表时间: 2016
• 期刊: Surface and Interface Analysis
• 影响因子: 1.7
• 作者: Walker C