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Plasmas created by extreme ultraviolet lasers

由极紫外激光产生的等离子体

基本信息

批准号：
EP/J019402/1
负责人：
Greg Tallents
金额：
$ 54.21万
依托单位：
University of York
依托单位国家：
英国
项目类别：
Research Grant
财政年份：
2012
资助国家：
英国
起止时间：
2012 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=EP%2FJ019402%2F1
关键词：
Plasmas created extreme ultraviolet lasers

项目摘要

The invention of the laser in the early 1960s led to experiments where high power (> million Watts) infra-red and visible pulsed lasers were focused onto solid targets in order to produce hot (> 0.5 million degrees Kelvin) plasmas. In almost 50 years of study, the physics of the laser interaction, the physics of the expanding plume and many important applications have been elucidated in some detail. When focussed onto solid targets, visible/infra-red lasers do not penetrate to the solid for most of the pulse duration, but are absorbed in the expanding plasma plume at densities 100- 1000 times smaller than the solid density. Dropping the laser wavelength into the extreme ultra-violet (EUV), however, enables the laser to penetrate into the solid and to create plasma directly at the solid density. Initial modelling studies that have been undertaken by the PI show that the interaction of EUV laser radiation with most solid targets will cause a rapid drop in opacity (so that the target 'bleaches'). Initially an attenuation length for the EUV photon energy is bleached and then another attenuation length, so that a 'bleaching wave' propagates through the solid target on a sub-nanosecond timescale. A much more massive amount of target material is effectively ablated than can occur with infra-red or visible radiation of the same pulse energy and focal spot diameter. Little modelling work has been undertaken to elucidate understanding of EUV laser-produced plasmas because of the lack of sufficiently energetic (> 10 microJoules) laboratory EUV lasers for experiments. However, reliable capillary discharge lasers operating at wavelength 46.9 nm (photon energy 26.4 eV) producing up to 1 milliJoule/pulse and peak powers of a million Watts have been developed at the Colorado State University (CSU). We propose to develop simulation models to interpret emission spectra and mass spectrometer results from EUV laser produced plasmas. We will test spectrometer diagnostics using the University of York high power infra-red laser and in collaboration with CSU make spectral and mass spectrometer measurements for comparison to the simulation models. A new class of laser-produced plasma will be studied with potential impact in the study of warm dense matter, laser cutting and ablation and solid material lithography with relevance to the $70B p.a. revenue industry associated with the manufacture of microelectromechanical systems (MEMS).

20世纪60年代早期激光器的发明导致了高功率（>百万瓦）红外和可见光脉冲激光聚焦到固体靶上以产生热（> 50万开尔文）等离子体的实验。在近50年的研究中，激光相互作用的物理学，膨胀羽流的物理学和许多重要的应用已经得到了详细的阐述。当聚焦到固体靶上时，可见光/红外激光在大部分脉冲持续时间内不会穿透到固体，而是以比固体密度小100- 1000倍的密度被膨胀的等离子体羽吸收。然而，将激光波长降低到极紫外线（EUV），使激光能够穿透固体并直接在固体密度下产生等离子体。PI进行的初步建模研究表明，EUV激光辐射与大多数固体目标的相互作用将导致不透明度迅速下降（因此目标“漂白”）。最初，EUV光子能量的衰减长度被漂白，然后是另一个衰减长度，使得“漂白波”在亚纳秒时间尺度上传播通过固体靶。与具有相同脉冲能量和焦斑直径的红外或可见光辐射相比，更大量的目标材料被有效地烧蚀。由于缺乏足够能量（> 10微焦耳）的实验室极紫外激光器进行实验，几乎没有进行建模工作来阐明对极紫外激光产生等离子体的理解。然而，在科罗拉多州立大学（CSU）已经开发出在波长46.9 nm（光子能量26.4 eV）下工作的可靠的毛细管放电激光器，其产生高达1毫焦耳/脉冲和百万瓦的峰值功率。我们建议开发模拟模型来解释发射光谱和质谱仪的结果从EUV激光产生的等离子体。我们将使用约克大学的高功率红外激光器测试光谱仪诊断，并与CSU合作进行光谱和质谱仪测量，以与模拟模型进行比较。将研究一类新的激光产生的等离子体，其在研究热致密物质、激光切割和烧蚀以及固体材料光刻方面具有潜在的影响，这与每年700亿美元的研究有关。与微机电系统（MEMS）制造相关的收入行业。