EPSRC Capital Award for Core Equipment: University of Oxford

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This bid is to significantly modernize and upgrade Oxford's current capability and capacity in manufacturing engineering at the micro- and nano-scale across our departments of Chemistry, Engineering Science, Materials, and Physics. Our goal is to combine next-generation, nano/micro-manufacturing tools with state-of-the-art fabrication processes in order to realise a range of cutting-edge technologies and major scientific breakthroughs across a broad gamut of fields in the physical sciences. In recent years, Oxford has become a leader in the development of new and advanced nano-manufacturing methodologies (such as photonic computing, displays, aberration-corrected 3D direct laser writing and additive nano-manufacturing); we wish to capitalise on this with the following investments in our underpinning micro/nano fabrication facilities:Combined Atomic Layer Deposition and Physical Vapour Deposition System Plasma-enhanced chemical vapour deposition Mask alignerDigital 3D imaging microscopeThe new instruments will be co-located in a centralised cleanroom which houses a variety of existing micro-, nano-, and photo-fabrication infrastructure, thereby leveraging previous EPSRC and University investments.