EPSRC Capital Award for Core Equipment: University of Oxford

EPSRC 核心设备资本奖：牛津大学

• 批准号: EP/T023899/1
• 负责人: Patrick Grant
• 金额: $ 89.19万
• 依托单位: University of Oxford
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2019
• 资助国家: 英国
• 起止时间: 2019 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FT023899%2F1
• 关键词: EPSRC; Capital; Award; Core; Equipment

This bid is to significantly modernize and upgrade Oxford's current capability and capacity in manufacturing engineering at the micro- and nano-scale across our departments of Chemistry, Engineering Science, Materials, and Physics. Our goal is to combine next-generation, nano/micro-manufacturing tools with state-of-the-art fabrication processes in order to realise a range of cutting-edge technologies and major scientific breakthroughs across a broad gamut of fields in the physical sciences. In recent years, Oxford has become a leader in the development of new and advanced nano-manufacturing methodologies (such as photonic computing, displays, aberration-corrected 3D direct laser writing and additive nano-manufacturing); we wish to capitalise on this with the following investments in our underpinning micro/nano fabrication facilities:Combined Atomic Layer Deposition and Physical Vapour Deposition System Plasma-enhanced chemical vapour deposition Mask alignerDigital 3D imaging microscopeThe new instruments will be co-located in a centralised cleanroom which houses a variety of existing micro-, nano-, and photo-fabrication infrastructure, thereby leveraging previous EPSRC and University investments.

此次竞标是为了显著现代化和提升牛津目前在微米和纳米尺度上的制造工程能力和能力，包括我们的化学、工程科学、材料和物理系。我们的目标是将下一代纳米/微制造工具与最先进的制造工艺相结合，以便在物理科学的广泛领域实现一系列尖端技术和重大科学突破。近年来，牛津大学在开发新的和先进的纳米制造方法(如光子计算、显示器、像差校正3D激光直接写入和附加纳米制造)方面处于领先地位；我们希望利用这一点，在我们的基础微/纳米制造设施中进行以下投资：原子层沉积和物理气相沉积系统等离子增强化学气相沉积掩膜对准数字3D成像显微镜新仪器将共置在一个中央净化室中，该净室容纳了各种现有的微、纳米和光制造基础设施，从而利用了EPSRC和大学之前的投资。