DEVELOPMENT OF HIGH FREQUENCY(>30 MHZ) ARRAY TRANSDUCERS

高频(>30 MHZ)阵列传感器的开发

• 批准号: 6071513
• 负责人: Wesley S. Hackenberger
• 金额: $ 9.89万
• 依托单位: TRS TECHNOLOGIES, INC.
• 依托单位国家: 美国
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-04-01 至 2000-12-31
• 项目状态: 已结题
• 来源: https://reporter.nih.gov/project-details/6071513
• 关键词: bioimaging /biomedical imaging; biomedical equipment development; ceramics; electron transport; polymers; sound frequency; ultrasound

Multilayer ceramic processing will be investigated as a method of forming 2- 2 PZT-polymer composites for ultrasound transducers with operating frequencies over 30 MHz. The fabrication of linear and phased arrays made from piezoelectric PZT-polymer composites is currently limited to less than 10 MHz by the fine feature sizes that need to be machined into piezoelectric ceramic. Dicing saw technology is currently limited to cut widths (kerf) of 15 um and post widths of > 20 um. However, by using tape casting technology in combination with a printed fugitive material to form kerfs, dimensions < 10 um for PZT beam widths and < 5 um for kerf widths can be formed. This will allow the fabrication of linear and phased arrays with operating frequencies> 30 MHz providing electronic beam steering and dynamic focus for high resolution imaging in applications such as dermatology, ophthalmology, and intravascular imaging. For the Phase I effort feasibility will be demonstrated by fabricating a single element composite 30 MHz transducer using multilayer technology. In Phase II the technique will be expanded to the fabrication of linear and phased arrays which will be tested in clinical trials. PROPOSED COMMERCIAL APPLICATIONS: Potential commercial applications of high frequency, phased array ultrasound transducers include medical imaging where feature sizes of interest are very small or where high resolution is needed for accuracy. Examples include dermatology (imaging of skin cancer tumors), ophthalmology, and intravascular imaging for minimally invasive surgery.

将研究多层陶瓷加工作为形成2- 2 pzt -聚合物复合材料的方法，用于工作频率超过30 MHz的超声换能器。由压电pzt -聚合物复合材料制成的线性和相控阵的制造目前受到需要加工成压电陶瓷的精细特征尺寸的限制，限制在小于10 MHz。切丁锯技术目前仅限于切割宽度（切口）为15微米和柱宽度为100 - 20微米。然而，通过将胶带铸造技术与印刷的易变材料相结合来形成刻痕，可以形成PZT梁宽度< 10 um和刻痕宽度< 5 um的尺寸。这将允许制作工作频率为> ~ 30mhz的线性和相控阵，为皮肤病学、眼科和血管内成像等应用的高分辨率成像提供电子束导向和动态聚焦。对于第一阶段的工作，将通过使用多层技术制造单元件复合30 MHz换能器来证明可行性。在第二阶段，该技术将扩展到线性和相控阵的制造，并将在临床试验中进行测试。建议的商业应用：高频相控阵超声换能器的潜在商业应用包括感兴趣的特征尺寸非常小或需要高分辨率以保证准确性的医学成像。例子包括皮肤病学（皮肤癌肿瘤的成像）、眼科和微创手术的血管内成像。