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Simulation and Measurement of Advanced Semiconductor Imaging Sensors

先进半导体成像传感器的仿真和测量

基本信息

批准号：
ST/H004858/1
负责人：
金额：
$ 9.28万
依托单位：
The Open University
依托单位国家：
英国
项目类别：
Training Grant
财政年份：
2010
资助国家：
英国
起止时间：
2010 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=ST%2FH004858%2F1
关键词：
Simulation Measurement Advanced Semiconductor Imaging

项目摘要

The e2v Centre for Electronic Imaging as a collaboration between e2v and the Open University to provide training for young scientists and engineers in the field of imaging detectors for science experiments. e2v have agreed to fund up to a rolling 12 PhD CASE students as part of this collaboration, which represents one of the largest concentrations of industrially-sponsored students under the CASE scheme. At a meeting with the PPARC executive in 2004 (involving Ian Halliday and Richard Wade), the research council agreed to support this ambitious plan for PhD student training. This single application is one of 3 CASE applications proposed into the 2009 round, exploring different aspects of imaging semiconductor device R&D of relevance to STFC science. Under our STFC Gaia grant, we have recently been using the Silvaco 3D device modelling software package to help in the European effort aimed at understanding the effect of space radiation daage in the CCDs. Using this software we are producing an accurate description of the pixels in the Gaia CCDs to inform how the charge is stored in the pixel as a function of signal size. This information, in particular the signal density distribution, is then used to calculate charge trapping times in the presence of prton-induced traps, and through Monte Carlo models the impact of the spce radiation on the CTE. This work is demonstrating that such modelling (in this istance using Silvaco) can provide a very poweful tool in the understanding of pixel structures, particularly when feature sizes become comparable to the fringing fields in the device (<5 microns). Our work on Gaia indicated a protential problem with one of the implants in the CCDs, which has subsequently been backed-up by measurements. Had the modelling technique been available at the time of design, then the customised Gaia CCDs could have been improved in performance yielding better sensitivity in the Gaia data products. Here we propose a PhD CASE studentship which will perform advanced modelling in 3D of CCD and CMOS pixel designs to aid understanding of the detailed movement of signal charge within the detectors leading to improvements in future imager designs. To help ensure that the modelling work and its results are accurate, we will specify test structures based on the early modelling which will then be designed and fabricated by e2v. These test structures will then be evaluated, and the results used to benchmark and validate the output from the model. The student will work on both traditional CCD device structures, plus the newer CONS Active Pixel Structure (APS) imagers currently being developed by e2v. One of the trends in scientific imagers is toward large imaging arrays having smaller pixels. As mentioned above, when the feature sizes become less than around 5 microns, the devices are subject to non-linear effects arising from the 'narrow channel effect'. For such large area/small pixel devices in the future, a thorough understanding of their detailed operation will become increasingly important. By the end of the studentship we would anticipate that a much greater understanding is obtained into the details of charge storage and movement within CCD and CMOS structures with the creation of new 'design rules' to help the designers create new cutting-edge sensors with improved performance.

e2v电子成像中心是e2v与开放大学的合作项目，为科学实验成像探测器领域的年轻科学家和工程师提供培训。作为此次合作的一部分，e2v已同意资助至多12名博士生，这是CASE计划下最集中的工业资助学生之一。在2004年与PPARC高管的一次会议上（与会者包括Ian Halliday和Richard Wade），研究委员会同意支持这一雄心勃勃的博士生培训计划。这个单一的应用程序是2009年提出的三个CASE应用程序之一，探索与STFC科学相关的成像半导体器件研发的不同方面。在我们的STFC Gaia资助下，我们最近一直在使用Silvaco 3D设备建模软件包来帮助欧洲的努力，旨在了解空间辐射损害对ccd的影响。使用该软件，我们正在生成盖亚ccd像素的准确描述，以告知电荷如何作为信号大小的函数存储在像素中。这些信息，特别是信号密度分布，然后用于计算质子诱导陷阱存在时的电荷捕获时间，并通过蒙特卡罗模型计算空间辐射对CTE的影响。这项工作表明，这种建模（在这种情况下使用Silvaco）可以为理解像素结构提供非常强大的工具，特别是当特征尺寸与设备中的边缘场（<5微米）相当时。我们在盖亚上的工作表明，ccd中的一个植入物存在潜在问题，这一问题随后得到了测量结果的支持。如果建模技术在设计时可用，那么定制的Gaia ccd可以在性能上得到改进，从而在Gaia数据产品中产生更好的灵敏度。在这里，我们提出了一个博士研究项目，该项目将对CCD和CMOS像素设计进行3D高级建模，以帮助理解探测器内信号电荷的详细运动，从而改进未来的成像仪设计。为了帮助确保建模工作及其结果的准确性，我们将根据早期建模指定测试结构，然后由e2v设计和制造。然后将对这些测试结构进行评估，并将结果用于基准测试和验证模型的输出。学生将研究传统的CCD设备结构，以及目前由e2v开发的较新的con有源像素结构（APS）成像仪。科学成像仪的趋势之一是采用具有更小像素的大型成像阵列。如上所述，当特征尺寸小于约5微米时，器件将受到“窄通道效应”引起的非线性效应的影响。对于未来这种大面积/小像素的设备，深入了解其详细操作将变得越来越重要。在学习结束时，我们预计将对CCD和CMOS结构中电荷存储和运动的细节有更深入的了解，并创建新的“设计规则”，以帮助设计师创建具有更高性能的新尖端传感器。