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Design and construction of a large-area hot filament reactor suitable for deposition of diamond films directly onto GaN substrates

设计和建造适合将金刚石薄膜直接沉积到 GaN 衬底上的大面积热丝反应器

基本信息

批准号：
1942608
负责人：
金额：
--
依托单位：
University of Bristol
依托单位国家：
英国
项目类别：
Studentship
财政年份：
2017
资助国家：
英国
起止时间：
2017 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=studentship-1942608
关键词：
Design construction large area hot

项目摘要

This PhD is aligned with the Program grant (PI Martin Kuball, Physics) with the aim of developing diamond-on-GaN technology for next generation power devices. It is funded by the University of Bristol's EPSRC DTA quota as part of their commitment to support the overall Programme grant.The student will work alongside a PDRA (whose remit is to develop new technologies to grow diamond directly on to GaN substrates), and develop methods and procedures to scale up this technology from substrates that are ~1sq.cm in size to 6"-diameter wafers common in the semiconductor industry. The student's main goal will be to modify an existing deposition reactor such that it can accept 6"-wafers, and to redesign the filament and power system such that diamond films will be deposited uniformly across these wafers.Some of the project will also involve scaling up of the seeding process, which currently uses a home-built electrospray apparatus. This will also be modified for larger-area substrates. Some preliminary seeding a deposition experiments will be undertaken on a range of novel substrates and materials, such as black Si needles, to fully understand the operating parameters.The student will be trained on various characterisation facilities, such as SEM, Raman, 4-point probe, as well as vacuum engineering.

该博士学位与计划资助（PI Martin Kuball，物理学）保持一致，旨在为下一代功率器件开发金刚石GaN技术。该项目由布里斯托大学的EPSRC DTA配额资助，作为他们支持整个项目资助承诺的一部分。该学生将与PDRA（其职责是开发直接在GaN衬底上生长金刚石的新技术）一起工作，并开发方法和程序，将该技术从约1平方厘米的衬底扩展到半导体行业常见的6”直径晶圆。学生们的主要目标将是改造现有的沉积反应器，使其能够接受6”晶片，并重新设计灯丝和电源系统，使金刚石薄膜均匀地沉积在这些晶片上。该项目的一些内容还将涉及扩大播种过程，目前使用自制的电喷雾设备。这也将被修改为更大面积的基板。学生将在一系列新的衬底和材料上进行一些初步的种子沉积实验，如黑硅针，以充分了解操作参数。学生将接受各种表征设备的培训，如SEM，拉曼，四点探针以及真空工程。