Si-based integratable Nano-Opto-Electro-Mechanical Systems

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This PhD project is aiming to investigate how the nanoelectromechanical (NEM) resonators respond to light via opto-electro-mechanical coupling to establish solid technological platform of Nano-Opto-Electro-Mechanical Systems (NOEMS), a new class of hybrid systems that is attracting much attention in recent years in the nanotechnology research field. Potential applications of NOEMS are reconfigurable devices, optical switches, optical sensors and opto-electro-mechanical signal transducers at high speed and ultra-low-power consumption. Si NEM resonators fabricated in a CMOS compatible manner in collaboration with CEA-Leti, France are employed in this project considering future development of integrated NOEMS on the silicon technology platform. A novel measurement system where NEM resonators in operation at RF/microwave frequencies are exposed to telecom laser will be developed. Simultaneous observation of optical and electromechanical responses will give great insight on opto-electro-mechanical coupling in nanoscale Si materials. Systematic characterisation of a set of NEM resonators with various dimensional parameters will offer novel design guideline of future integrated NOEMS.