Si-based integratable Nano-Opto-Electro-Mechanical Systems

硅基可集成纳米光机电系统

• 批准号: 2115040
• 金额: --
• 依托单位: University of Southampton
• 依托单位国家: 英国
• 项目类别: Studentship
• 财政年份: 2018
• 资助国家: 英国
• 起止时间: 2018 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=studentship-2115040
• 关键词: Si; based; integratable; Nano; Opto

This PhD project is aiming to investigate how the nanoelectromechanical (NEM) resonators respond to light via opto-electro-mechanical coupling to establish solid technological platform of Nano-Opto-Electro-Mechanical Systems (NOEMS), a new class of hybrid systems that is attracting much attention in recent years in the nanotechnology research field. Potential applications of NOEMS are reconfigurable devices, optical switches, optical sensors and opto-electro-mechanical signal transducers at high speed and ultra-low-power consumption. Si NEM resonators fabricated in a CMOS compatible manner in collaboration with CEA-Leti, France are employed in this project considering future development of integrated NOEMS on the silicon technology platform. A novel measurement system where NEM resonators in operation at RF/microwave frequencies are exposed to telecom laser will be developed. Simultaneous observation of optical and electromechanical responses will give great insight on opto-electro-mechanical coupling in nanoscale Si materials. Systematic characterisation of a set of NEM resonators with various dimensional parameters will offer novel design guideline of future integrated NOEMS.

本博士项目旨在研究纳米机电（NEM）谐振器如何通过光机电耦合响应光，以建立纳米光机电系统（NOEMS）的坚实技术平台，纳米光机电系统是近年来在纳米技术研究领域备受关注的一类新型混合系统。 NOEMS的潜在应用是高速和超低功耗的可重构器件、光开关、光学传感器和光电机械信号传感器。该项目采用与法国 CEA-Leti 合作以 CMOS 兼容方式制造的 Si NEM 谐振器，考虑到硅技术平台上集成 NOEMS 的未来发展。将开发一种新颖的测量系统，其中在射频/微波频率下运行的 NEM 谐振器暴露于电信激光。同时观察光学和机电响应将为纳米级硅材料中的光机电耦合提供深入的见解。一组具有各种尺寸参数的 NEM 谐振器的系统表征将为未来集成 NOEMS 提供新颖的设计指南。