Miniature Phase Grating interferometer contact gauge /high speed phase shifting interferometric gauge

两个项目。小型化PGI计：基于触控笔的测量系统已经使用了几十年，采用电感，光学旋转编码器或干涉运动传感策略。以前的学生vladimir Horjkovs成功地模拟和描述了Taylor Hobson现有的PGI技术[1]，并设计和证明了一个成本更低的可扩展版本。这个项目的目标是在不影响其关键的高动态范围和内在稳定性的情况下实现一个微型版本。2. 使用相移激光干涉测量的位置是众所周知的，但是建立商业上可行的单位，同时保持纳米级的稳定性是不平凡的。大多数设计采用单一和多个激光波长[2,3]或ASE源，由机械运动（压电），电光[4]或声光方法产生相移；前一种压电方法目前在一个系列的仪器中使用，但它是测量（采样）速度在~2kHz的限制因素。目标是开发一种采样率超过50kHz的架构，同时保持nm级的稳定性和精度，实际工作范围为1-1000 mm。References1。美国专利5517307 1996专利DE 10 2008 033 942 B3《光学学报》，2013年第8卷第1期。光学学报，26(3):3443 / 2018

Two Projects. 1. Miniaturised PGI gauge: Stylus based measurement systems have been used for decades employing inductive, optical rotary encoder or interferometric motion sensing strategies. A previous student Vladimirs Horjkovs successfully modelled and characterised Taylor Hobson's existing PGI technology [1] as well as deigning and proving out a lower cost scalable version. The objective of this project is to realise a miniature version without compromising its key high dynamic range and intrinsic stability. 2. The use of phase shifting laser interferometry for position measurement is well known however building commercially viable units whilst maintain nm level stability is non-trivial.Most designs employ single and multiple laser wavelengths [2,3] or ASE sources with phase shifting generated by mechanical movement (piezo), Electro-optical [4] or Acousto-optical methods; the former piezo approach is currently used in one family of instruments but is the limiting factor for measurement (sampling) speed at ~2kHz. The objective is to develop an architecture where sampling rates exceed 50kHz whilst maintaining nm level stability and accuracy with practicable working ranges 1-1000 mm. References1. Patent US 5517307 1996 2. Patent DE 10 2008 033 942 B3 3. Proceedings Volume 8884, Optifab 2013 8884V (2013) 4. Optics Express 26(3):3443 February 2018