Miniature Phase Grating interferometer contact gauge /high speed phase shifting interferometric gauge

微型相位光栅干涉仪接触仪/高速移相干涉仪

• 批准号: 2262874
• 金额: --
• 依托单位: Heriot-Watt University
• 依托单位国家: 英国
• 项目类别: Studentship
• 财政年份: 2019
• 资助国家: 英国
• 起止时间: 2019 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=studentship-2262874
• 关键词: Miniature; Phase; Grating; interferometer; contact

Two Projects. 1. Miniaturised PGI gauge: Stylus based measurement systems have been used for decades employing inductive, optical rotary encoder or interferometric motion sensing strategies. A previous student Vladimirs Horjkovs successfully modelled and characterised Taylor Hobson's existing PGI technology [1] as well as deigning and proving out a lower cost scalable version. The objective of this project is to realise a miniature version without compromising its key high dynamic range and intrinsic stability. 2. The use of phase shifting laser interferometry for position measurement is well known however building commercially viable units whilst maintain nm level stability is non-trivial.Most designs employ single and multiple laser wavelengths [2,3] or ASE sources with phase shifting generated by mechanical movement (piezo), Electro-optical [4] or Acousto-optical methods; the former piezo approach is currently used in one family of instruments but is the limiting factor for measurement (sampling) speed at ~2kHz. The objective is to develop an architecture where sampling rates exceed 50kHz whilst maintaining nm level stability and accuracy with practicable working ranges 1-1000 mm. References1. Patent US 5517307 1996 2. Patent DE 10 2008 033 942 B3 3. Proceedings Volume 8884, Optifab 2013 8884V (2013) 4. Optics Express 26(3):3443 February 2018

两个项目。1.小型化的PGI量规：几十年来，基于触针的测量系统一直使用感应式、光学旋转编码器或干涉式运动传感策略。以前的学生Vladimir Horjkovs成功地模拟和描述了Taylor Hobson现有的PGI技术[1]，并设计并证明了一种成本更低的可扩展版本。该项目的目标是在不影响其关键的高动态范围和内在稳定性的情况下实现微型版本。2.相移激光干涉术用于位置测量是众所周知的，然而，在建立商业上可行的单元的同时保持纳米级稳定性并不是一件容易的事。大多数设计使用单一和多个激光波长[2，3]或ASE源，其相移由机械运动(PECHZO)、电光[4]或声光方法产生；前一种PIZO方法目前用于一系列仪器中，但在~2 KHZ的测量(采样)速度方面是限制因素。我们的目标是开发一种采样率超过50 kHz的体系结构，同时保持纳米级的稳定性和精度，实际工作范围为1-1000 mm。参考文献1。专利US 5517307 1996年2.专利DE 10 2008033 942 B3 3.诉讼程序卷8884，Optifab 2013年8884V(2013年)4.光学快报26(3)：3443 2018年2月