CASE Quantitative Thermal Conduction Measurement and Imaging at 200nm scale

现代电子和光学元件的性能主要受热效应的影响。现代设备广泛使用纳米结构来获得大大增强的光学和电子性能，但这种结构的成本很高，因为它降低了所用材料的导热能力。纳米尺度下的热传导与宏观距离下的热传导有显著不同，受声边界反射效应、弹道传导、声子波长相关散射和量子化热传导的影响。由于纳米尺度热输运的物理性质是如此的不同，因此有必要开发新的测量技术。纳米尺度的热测量通常使用“扫描热显微镜”进行，这是一种与原子力显微镜（AFM）相关的技术，其中热传感器与MEMS AFM传感器相结合，同时提供高分辨率的形貌和温度测量。该项目关注的是使用定制的AFM探针在纳米尺度上量化热传导的技术的开发和验证，该探针有两个尖端，相隔几百纳米。这两个尖端将充当加热器和温度计，允许测量已知热功率流的温升：传统上，这将构成热导率的测量。技术目标是开发一种测量方法，确定测量的有效范围，并根据已知散装材料的特性对测量误差进行量化。该项目将涉及詹姆斯瓦特纳米制造中心先进传感器的纳米制造，并结合相关仪器和测量技术的开发。

The performance of modern electronic and optical components is dominated by thermal effects. Modern devices make extensive use of nanostructuring to obtain greatly enhanced optical and electronic properties, but this structuring comes at a significant cost since it reduces the ability of the materials used to conduct away heat. Thermal conduction at the nanoscale is significantly different to that observed at macroscopic distances, being subject to acoustic boundary reflection effects, ballistic conduction, phonon-wavelength dependent scattering and quantized thermal conduction. Since the physics of nanoscale thermal transport is so profoundly different it is necessary to develop new techniques for its measurement.Nanoscale thermal measurements are often made using "Scanning Thermal Microscopy", a technique related to Atomic Force Microscopy (AFM) in which a thermal sensor is combined with a MEMS AFM sensor to give high resolution measurements of topography and temperature at the same time. This project is concerned with the development and validation of techniques to quantify thermal conduction at the nanoscale using custom AFM probes which have two tips, separated by a few hundred nanometres. The two tips will act as heaters and thermometers, allowing a measurement of the temperature rise from the flow of a known thermal power: Classically this would constitute a measurement of thermal conductivity. Technical objectives are the development of a measurement methodology, determination of the range of validity of the measurement and quantification of errors in measurement with reference to the characteristics of known bulk materials. The project will involve nanofabrication of the advanced sensors in the James Watt Nanofabrication Centre combined with the development of the associated instrumentation and measurement techniques.