Field Effected Aerosol Assisted Chemical Vapour Deposition (FE-AACVD) of Thin Film Materials

金属氧化物半导体中的无机薄膜可以实现广泛的电子和能量存储应用，具有巨大的工业和社会潜力。气溶胶辅助化学气相沉积(AACVD)产生的金属氧化物材料通常在结晶度和结构的特定取向上形成，称为形态，适用于所使用的每种前体组合和衬底。将研究电场和磁场对AACVD中气雾化前驱体在传输和沉积过程中的导向作用，目的是获得具有改进效果的新型形貌的无机薄膜。最初的目标将是制造用于水分解过程的半导体光电电极。将首先实现要沉积的已知和新型d-嵌段和/或f-嵌段无机前体的化学合成，在可能的情况下以单一来源的前体设计为目标。钒和铁等元素的偶极和顺磁前体有望最大限度地发挥与电场和磁场的协同作用。作者：L.Romero，R.Binions等人。对于电场下二氧化钛薄膜的合成，AACVD提供了一个合适的参考点。在研究沉积过程中引入电场和磁场对形貌的影响之前，将进行AACVD沉积。分析技术，如X射线衍射和扫描电子显微镜，将被用来解释结果。最有希望的前体(S)将被用于深入分析输送过程中气溶胶的组成和分布，以了解与形态控制的相关性。

Thin inorganic films as seen in metal oxide semiconductors can perform wide-ranging electronic and energy storage applications and possess great potential for both industry and society. Metal oxide materials generated by Aerosol Assisted Chemical Vapour Deposition (AACVD) typically form in a specific orientation of crystallinity and structure, termed a morphology, for each precursor combination and substrate used. The directing effects of electric and magnetic fields on aerosolised precursors in AACVD during transport and deposition will be investigated with the aim of accessing thin inorganic films with novel morphologies of improved efficacy. The initial target will be making semiconducting photoelectrodes of use in water splitting processes. The chemical synthesis of both known and novel d-block and/or f-block inorganic precursors to be deposited will first be achieved, targeting single source precursor designs where possible. Dipolar and paramagnetic precursors of elements such as vanadium and iron appear promising candidates for maximising synergy with electric and magnetic fields. Work by L. Romero, R. Binions et al. concerning titanium dioxide film synthesis under electric field AACVD will provide a suitable reference point. Control AACVD depositions will be performed before the morphological impact of introducing electric and magnetic fields during deposition is investigated. Analytical techniques e.g., X-ray diffraction and scanning electron microscopy, will be used to interpret results. The most promising precursor(s) will be taken forwards for an in-depth analysis of aerosol composition and distribution during transport to gain understanding of correlations with morphological control.