Manufacturing Research and Development of 2D Electrostrictive Ultrasonic Arrays

描述（由申请人提供）：拟定开发用于实时超声体积成像的电致伸缩阵列的制造工艺。迄今为止，由于制造效率低、换能器元件灵敏度、与驱动电路和互连密度相关联的复杂性，具有数千个阵列元件的2D换能器阵列的商业开发受到显著限制。本文提出的研究和开发将简化互连并优化阵列的波束形成能力。AcoustTx在新型压电加工和制造技术方面的经验将允许开发商业上有效和低成本的制造工艺。所提出的近期产品是用于体积成像的行/列（128个元件乘128个元件）电致伸缩阵列，其在放射学、产科和妇科领域中具有广泛的应用。除了这个近期市场之外，存在将联合收割机有效的2D电致伸缩阵列与商业上可行的低成本制造工艺相结合的潜力，该工艺允许真实的实时超声大孔径体积成像在临床中变得常见，用于i）高级非侵入性诊断程序（例如乳腺癌、内出血、心律失常等），ii）用于微创手术的非侵入性手术间引导和iii）组合成像和治疗超声应用。第一阶段的工作有以下目标：i）开发和优化电致伸缩阵列制造处理步骤ii）开发互连能力优化制造效率，iii）开发3D波束形成和聚焦能力和iv）评估和测试2D（48个元件乘48个元件）电致伸缩行/列阵列原型。在成功完成第一阶段目标的基础上，拟议的第二阶段工作将针对i）开发/优化可扩展的制造方法，以生产中心频率为5 MHz的128 x128元件2D体积成像阵列，ii）封装阵列，设计和制造偏置硬件和控制电路，iii）内部临床研究，以评估性能。本提案是对PA-06-013的回应，PA-06-013是对美国总统第13329号行政命令的回应，该行政命令高度重视针对制造业研究与开发的SBIR计划。

DESCRIPTION (provided by applicant): Proposed is the development of manufacturing processes for electrostrictive arrays allowing for real-time ultrasound volumetric imaging. To date, the commercial development of 2D transducer arrays having thousands of array elements has been significantly limited due to manufacturing inefficiencies, transducer element sensitivity; the complexity associated with the driving circuitry and interconnect density. The proposed research and development herein will simplify the interconnects and optimize the beam forming capabilities of the array. AcousTx's experience in novel piezoelectric processing and fabrication techniques will allow for the development of commercially efficient and low cost manufacturing processes. The proposed near term product is a row/column (128 elements by 128 elements) electrostrictive array for volumetric imaging having extensive applications in the fields of radiology, obstetrics and gynecology. Beyond this near term market, lies the potential to combine efficient 2D electrostrictive arrays with the commercially viable and low cost manufacturing processes allowing real time ultrasound large aperture volumetric imaging to become common place in clinics for purposes of i) Advanced non-invasive diagnostic procedures (e.g. breast cancer, internal bleeding, heart arrhythmias etc.), ii) Non-invasive inter-operative guidance for minimally invasive surgery and iii) Combined imaging and therapeutic ultrasound applications. The Phase One effort has the following objectives: i) Develop and optimize the electrostrictive array fabrication processing steps ii) Develop interconnect capability optimized for manufacturing efficiency, iii) Develop beam forming and focusing capabilities in 3D and iv) Evaluate and test a 2D (48 element by 48 element) electrostrictive row/column array prototype. Based upon the successful completion of the Phase One aims, the proposed Phase Two work will be directed towards i) developing/optimizing scalable manufacturing methods to produce a 128 x128 element 2D volume imaging array with a center frequency of 5MHz and ii) packaging the array, design and fabrication of the bias hardware and control circuitry and an iii) internal clinical study to evaluate performance. This proposal is in response to PA-06-013 which is in response to an Executive Order 13329 from the President of the United States placing high priority on SBIR programs directed to Manufacturing Research and Development.