Optical profiler for fabrication process development and microdevice characterization

用于制造工艺开发和微器件表征的光学轮廓仪

• 批准号: 345729-2007
• 负责人: Stoeber, Boris
• 金额: $ 9.25万
• 依托单位: University of British Columbia
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2006
• 资助国家: 加拿大
• 起止时间: 2006-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=326269
• 关键词: Optical; profiler; fabrication; process; development

This grant will support research on microelectromechanical systems (MEMS), microfabrication technologies and precision manufacturing with applications in fields such as micro optics, development of non-traditional micromachining processes, tissue engineering, microvalves and inertial sensors. The requested optical profiler will enable us to measure the topology of microstructures and machined surfaces at a high lateral (< 1 µm) and vertical (< 1 nm) resolution. Optical interferometry is a contact-free characterization technique, thus avoiding contamination and mechanical damage of the surface under measurement. This optical profiler is a standard metrology tool found is state-of-the-art research facilities for microelectromechanical systems and nanotechnology. The optical profiler will support various research programs of 8 recently hired researchers at UBC with expertise in MEMS, microfabrication technologies, microelectronics, nanotechnology and precision manufacturing. The non-contact measurement capabilities of the optical profiler and its high spatial resolution are necessary for the development of new fabrication technologies for devices with small feature sizes and for the characterization of delicate microfabricated devices. It will be used to characterize microfabricated micro optics components for new video projection technologies. It will also be necessary for the development of non-traditional microfabrication technologies based on micro-electro-discharge-machining and inkjet printing for tissue engineering or microelectronics, as well as precision manufacturing technologies. The technologies that we will develop using this tool will provide Canadian researchers with new fabrication capabilities required to develop the most innovative devices. Furthermore, the optical profiler will support research on microactuators, microsensors and implantable microdevices, all of which have biomedical applications and will therefore strengthen Canada's position in this area.

该基金将支持微机电系统（MEMS）、微加工技术和精密制造的研究，并应用于微光学、非传统微加工工艺的开发、组织工程、微阀和惯性传感器等领域。所要求的光学剖面仪将使我们能够以高横向（< 1 μ m）和垂直（< 1 nm）分辨率测量微结构和加工表面的拓扑结构。光学干涉测量是一种无接触的表征技术，因此避免了被测表面的污染和机械损伤。这种光学分析器是一种标准的计量工具，是最先进的微机电系统和纳米技术的研究设施。光学剖面仪将支持UBC最近聘请的8名研究人员的各种研究项目，这些研究人员在MEMS、微制造技术、微电子、纳米技术和精密制造方面具有专业知识。光学剖面仪的非接触式测量能力及其高空间分辨率对于小尺寸器件的新制造技术的发展和精细微加工器件的表征是必要的。它将用于表征新的视频投影技术的微制造微光学元件。这对于发展组织工程或微电子领域的微放电加工和喷墨打印等非传统微加工技术以及精密制造技术也是必要的。我们将使用该工具开发的技术将为加拿大研究人员提供开发最具创新性设备所需的新制造能力。此外，光学剖面仪将支持微致动器、微传感器和可植入微型装置的研究，所有这些都具有生物医学应用，因此将加强加拿大在这一领域的地位。