Optical profiler for fabrication process development and microdevice characterization

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This grant will support research on microelectromechanical systems (MEMS), microfabrication technologies and precision manufacturing with applications in fields such as micro optics, development of non-traditional micromachining processes, tissue engineering, microvalves and inertial sensors. The requested optical profiler will enable us to measure the topology of microstructures and machined surfaces at a high lateral (< 1 µm) and vertical (< 1 nm) resolution. Optical interferometry is a contact-free characterization technique, thus avoiding contamination and mechanical damage of the surface under measurement. This optical profiler is a standard metrology tool found is state-of-the-art research facilities for microelectromechanical systems and nanotechnology. The optical profiler will support various research programs of 8 recently hired researchers at UBC with expertise in MEMS, microfabrication technologies, microelectronics, nanotechnology and precision manufacturing. The non-contact measurement capabilities of the optical profiler and its high spatial resolution are necessary for the development of new fabrication technologies for devices with small feature sizes and for the characterization of delicate microfabricated devices. It will be used to characterize microfabricated micro optics components for new video projection technologies. It will also be necessary for the development of non-traditional microfabrication technologies based on micro-electro-discharge-machining and inkjet printing for tissue engineering or microelectronics, as well as precision manufacturing technologies. The technologies that we will develop using this tool will provide Canadian researchers with new fabrication capabilities required to develop the most innovative devices. Furthermore, the optical profiler will support research on microactuators, microsensors and implantable microdevices, all of which have biomedical applications and will therefore strengthen Canada's position in this area.