Critical machine repairs and data system upgrades for a field-emission SEM

场发射 SEM 的关键机器维修和数据系统升级

• 批准号: 359198-2008
• 负责人: Leung, KamTong
• 金额: $ 10.88万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2007
• 资助国家: 加拿大
• 起止时间: 2007-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=365925
• 关键词: Critical; machine; repairs; data; system

This minor equipment application seeks the crucial support for several repairs to the critical components in the first and only field-emission scanning electron microscope (SEM) at the University of Waterloo.  Equipped with an EDAX energy dispersive X-ray (EDX) spectrometer for elemental analysis and a TSL electron-backscatter diffraction (EBSD) system for orientation imaging microscopy (OIM), as well as a Nabity-Raith e-beam writer for e-beam lithography, this Zeiss/LEO FESEM-1530 SEM system is one of the most flexible multi-technique field-emission SEMs in Canada.  This SEM system has been in operation since 2000 and has been under constant heavy usage by over 80 local research groups from the University of Waterloo (and the University of Guelph and Wilfrid Laurier University) and 20 other academic groups from the rest of Canada.  Specifically, the support will allow us to replace a failing turbo pump with a corroded water loop, a degraded EDX detector and a faulty OIM camera.  The support will also enable us to bring the data systems and software (all currently working in the Microsoft NT environment) up to the more robust and secure XP systems.  The software updates will significantly enhance the machine performance with new acquisition and processing capabilities for the individual systems, enabling new characterization experiments not possible before.  These critical repairs and updates will bring the Waterloo SEM back up to full operation at near state-of-the-art level.  The requested repairs are critically needed for the continued survival of our diverse multiple materials science and engineering research programs at Waterloo, and indeed the thesis works of over 100 graduate students vitally depend on this emergency fix.

这个小型设备应用程序寻求对滑铁卢大学第一台也是唯一一台场发射扫描电子显微镜（SEM）的关键部件进行几次维修的关键支持。配有用于元素分析的EDAX能量色散x射线（EDX）光谱仪和用于定向成像显微镜（OIM）的TSL电子背散射衍射（EBSD）系统，以及用于电子束光刻的Nabity-Raith电子束编写器，这台蔡司/LEO FESEM-1530扫描电镜系统是加拿大最灵活的多技术场发射扫描电镜系统之一。该SEM系统自2000年开始运行，并被滑铁卢大学（以及圭尔夫大学和威尔弗里德劳里埃大学）的80多个当地研究小组和加拿大其他地区的20个其他学术团体持续大量使用。具体来说，该支架将允许我们用腐蚀的水回路、退化的EDX探测器和故障的OIM相机替换故障的涡轮泵。这项支持还将使我们能够将数据系统和软件（目前都在Microsoft NT环境中工作）提升到更健壮和安全的XP系统。软件更新将显著提高机器性能，为单个系统提供新的采集和处理能力，实现以前不可能实现的新表征实验。这些关键的维修和更新将使滑铁卢扫描电镜恢复到接近最先进水平的全面运行。所要求的维修对于我们在滑铁卢的多种材料科学和工程研究项目的持续生存是至关重要的，事实上，100多名研究生的论文工作至关重要地依赖于这次紧急修复。