Interaction of charged particles with condensed media and surfaces

带电粒子与凝聚介质和表面的相互作用

• 批准号: 9384-2006
• 负责人: Lennard, William
• 金额: $ 2.62万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2008
• 资助国家: 加拿大
• 起止时间: 2008-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=389973
• 关键词: Interaction; charged; particles; condensed; media

The general area of research relates to materials science studies using ion beam excitation techniques for both structural and compositional analyses, focusing particularly on surface and interface properties as functions of growth/fabrication parameters.  The primary projects are:  (i)  studies of high-k dielectric materials that are being considered for future microelectronic applications, specifically silicate materials incorporating Gd, Hf, ...;  (ii) the development of novel absolute surface analytical techniques using charged particle beams, capable of both high depth resolution and monolayer sensitivity.  The latter objective involves fundamental studies to examine/measure the interaction probabilities as charged particles penetrate into condensed media:  e.g. their slowing down rate, scattering probabilities, nuclear reaction rates, X-ray emission probabilities, charge state probabilities, ...  These studies are important to several areas of science (physics, chemistry, earth sciences, electrical engineering, etc.) that frequently require quantitative measurements of compositional parameters for technologically and environmentally important materials.

主要研究领域是利用离子束激发技术对材料进行结构和成分分析，特别关注表面和界面特性随生长/制造参数的变化。主要研究项目是：（i）研究未来微电子应用中的高k电介质材料，特别是含有Gd，Hf，... (ii)利用带电粒子束发展新颖的绝对表面分析技术，既有高的深度分辨率，又有单层灵敏度。后者的目标涉及基础研究，以检查/测量带电粒子穿透凝聚介质时的相互作用概率：例如，它们的减速率，散射概率，核反应率，X射线发射概率，电荷态概率，…… 这些研究对几个科学领域（物理学、化学、地球科学、电气工程等）都很重要。这经常需要对技术上和环境上重要的材料的组成参数进行定量测量。