High performance 3D MEMS antenna technology

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Recently, 60GHz spectrum has been released for wireless transmission applications for high data rates. Millimeter size antennas are required in order to accommodate the operation frequency. However, the signal can be attenuated easily in everyday environment and raising the efficiency of antennas becomes essential. Easiest method to improve the efficiency of microfabricated antennas is to raise the antennas from ground plane and move the direction of the polarization vertical to the substrate in order to minimize substrate loss. Self-assembly mechanism for parallel fabrication of three-dimensional microstructures will be developed for fabrication of highly efficient 60GHz antennas. The proposed self-assembly method allows fabrication of three-dimensional micro-electro-mechanical systems (MEMS) structures without the need for an assembly. Thus, a large number of three-dimensional MEMS devices can be fabricated at low cost and in less time. The fabrication is performed under low temperature and is compatible with the widely available CMOS fabrication technology for development of on-chip antennas. The flexibility to create three-dimensional antennas of widely varying shape also enables fabrication of multiple antennas with different polarization patterns on a single substrate. Multiple polarization patterns can be used concurrently to increase the bandwidth for a given operation frequency.