High performance 3D MEMS antenna technology

最近，60GHz频谱已被发布用于高数据速率的无线传输应用。 需要毫米尺寸的天线以适应操作频率。然而，在日常环境中，信号很容易衰减，提高天线的效率变得至关重要。提高微加工天线效率的最佳方法是将天线从接地面升高，并使极化方向垂直于衬底，以最小化衬底损耗。为研制高效率的60GHz天线，将开发用于并行制造三维微结构的自组装机制。所提出的自组装方法允许在不需要组装的情况下制造三维微机电系统（MEMS）结构。因此，可以以低成本和更少的时间制造大量的三维MEMS器件。该制作是在低温下进行的，并与广泛使用的CMOS制造技术的芯片上天线的发展是兼容的。创建广泛变化形状的三维天线的灵活性还使得能够在单个基板上制造具有不同极化图案的多个天线。可以同时使用多个偏振模式来增加给定操作频率的带宽。

Recently, 60GHz spectrum has been released for wireless transmission applications for high data rates. Millimeter size antennas are required in order to accommodate the operation frequency. However, the signal can be attenuated easily in everyday environment and raising the efficiency of antennas becomes essential. Easiest method to improve the efficiency of microfabricated antennas is to raise the antennas from ground plane and move the direction of the polarization vertical to the substrate in order to minimize substrate loss. Self-assembly mechanism for parallel fabrication of three-dimensional microstructures will be developed for fabrication of highly efficient 60GHz antennas. The proposed self-assembly method allows fabrication of three-dimensional micro-electro-mechanical systems (MEMS) structures without the need for an assembly. Thus, a large number of three-dimensional MEMS devices can be fabricated at low cost and in less time. The fabrication is performed under low temperature and is compatible with the widely available CMOS fabrication technology for development of on-chip antennas. The flexibility to create three-dimensional antennas of widely varying shape also enables fabrication of multiple antennas with different polarization patterns on a single substrate. Multiple polarization patterns can be used concurrently to increase the bandwidth for a given operation frequency.