Multifunctional DC/AC semiconductor characterization system

本建议书旨在购买多功能DC/AC半导体表征系统（DC/AC-SCS），以支持申请人旨在开发用于量子信息处理的新型碳纳米管生物传感器和自旋电子器件的研究计划。DC/AC-SCS经过优化配置，可满足低功耗和阵列式纳米晶体管的表征需求。这是一个必不可少的工具，将用于从最初的纳米材料表征到设备制造和化学修饰的各个阶段。（例如区分半导体碳纳米管与金属碳纳米管），以验证微/纳米制造工艺（例如，检查短路、表面清洁度），以改进器件设计和性能（例如，接触金属、材料密度和几何形状对切换和切换的影响），以及化学改性方案的优化（例如，前后电传输性质的变化）。此外，DC/AC-SCS具有扩展的驱动/测量多路传感器阵列和单分子结合和传输事件的电检测能力。目前在滑铁卢没有类似的设备可供我们使用，符合所有要求的规格。所要求的仪器不仅将大大有利于我们的研究纳米电子学，但也提供了宝贵的培训，许多高素质的人才。

This proposal is for the purchase of a multifunctional DC/AC semiconductor characterization system (DC/AC-SCS) to support the applicants' research programs aimed at developing novel carbon nanotube biosensors and spintronic devices for quantum information processing. The DC/AC-SCS is optimally configured to address the needs in characterization of low-power and arrayed nano-transistors. It is an essential tool that will be used at various stages of fabrication and chemical modification of the devices, from initial nanomaterial characterization (e.g. differentiate semiconducting vs. metallic carbon nanotubes), to verification of micro/nano-fabrication process (e.g. check for short-circuit, surface cleanness), to improvement of device design and performance (e.g. effects of contact metal, material density, and geometry on switching and transconductance), and to optimization of chemical modification schemes (e.g. change in electrical transport properties before and after). In addition, the DC/AC-SCS has extended capabilities for driving/measuring multiplexed sensor arrays and electrical detection of single-molecule binding and transport events. There is no similar equipment currently available to us at Waterloo meeting all required specifications. The requested instrument will not only greatly benefit our research on nanoelectronics but also provide valuable training for many highly qualified personnel.