Spectroscopic Ellipsometry for advanced CMOS, MEMs, and polymer-based materials and devices

适用于先进 CMOS、MEM 以及聚合物材料和器件的光谱椭偏仪

• 批准号: 390038-2010
• 负责人: Buchanan, Douglas
• 金额: $ 9.29万
• 依托单位: University of Manitoba
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2009
• 资助国家: 加拿大
• 起止时间: 2009-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=443088
• 关键词: Spectroscopic; Ellipsometry; advanced; CMOS; MEMs

Dimensional scaling of many different types of materials and devices has been required to continue to meet the demands of the ever-increasing performance requirements. To produce advanced materials and devices, precise measurement on the scale of individual atoms is required. This type of measurement is required for many research areas, including, advanced silicon-based materials and devices, polymer-based devices for memory and sensor applications, micro-electro-mechanical systems (MEMS), photonic bandgap materials and devices, etc.. It is the acquisition of a Spectroscopic Ellipsometer (SE) system that is the focus of this proposal. The Spectroscopic Ellipsometer system is required for material and device analysis to facilitate the measurement of the thickness and the optical properties of thin films on a sub 1nm scale. In many applications these films can be made up of multiple layers. A Spectroscopic Ellipsometer is purpose built for analysing these type of film stacks. The fabrication and analysis of these films and devices will be carried out at the University of Manitoba. The equipment requested in this proposal will be used in conjunction with other analysis and fabrication equipment already in place in the Nano-System Fabrication Laboratory at the University of Manitoba. A few examples of the application of this system to research that is currently being undertaken at the University of Manitoba include research into silicon-based materials and devices, the development of switchable photonic band gap components, micro-electro-mechanical systems (MEMS) and conjugated polymer systems.

许多不同类型的材料和器件的尺寸缩放一直需要继续满足不断增长的性能要求的需求。为了生产先进的材料和设备，需要对单个原子进行精确测量。许多研究领域都需要这种类型的测量，包括先进的硅基材料和器件、用于存储器和传感器应用的聚合物基器件、微机电系统（MEMS）、光子带隙材料和器件等。这是一个光谱椭偏仪（SE）系统的收购是这个建议的重点。光谱椭偏仪系统用于材料和器件分析，以便于在1nm以下测量薄膜的厚度和光学特性。在许多应用中，这些膜可以由多层组成。光谱椭偏仪是专门为分析这些类型的薄膜堆栈而建造的。这些薄膜和装置的制作和分析将在马尼托巴大学进行。本提案中要求的设备将与马尼托巴大学纳米系统制造实验室现有的其他分析和制造设备一起使用。该系统应用于马尼托巴大学目前正在进行的研究的几个例子包括硅基材料和器件的研究，可切换光子带隙组件的开发，微机电系统（MEMS）和共轭聚合物系统。