Spectroscopic Ellipsometry for advanced CMOS, MEMs, and polymer-based materials and devices

为了继续满足不断增长的性能要求，需要对许多不同类型的材料和器件进行尺寸缩放。为了生产先进的材料和设备，需要对单个原子的尺度进行精确的测量。这种类型的测量在许多研究领域都是必需的，包括先进的硅基材料和器件、用于存储和传感器应用的聚合物基器件、微电子机械系统(MEMS)、光子带隙材料和器件等。收购光谱椭偏仪(SE)系统是这项提案的重点。材料和器件分析需要使用椭圆偏振光谱仪系统，以便在1 nm以下的范围内测量薄膜的厚度和光学性质。在许多应用中，这些膜可以由多层组成。光谱椭偏仪是专门为分析这些类型的薄膜堆叠而建造的。这些薄膜和器件的制造和分析将在马尼托巴大学进行。本提案所要求的设备将与马尼托巴大学纳米系统制造实验室已有的其他分析和制造设备一起使用。马尼托巴大学目前正在进行的将该系统应用于研究的几个例子包括硅基材料和器件的研究、可切换光子带隙元件的开发、微电子机械系统(MEMS)和共轭聚合物系统的开发。

Dimensional scaling of many different types of materials and devices has been required to continue to meet the demands of the ever-increasing performance requirements. To produce advanced materials and devices, precise measurement on the scale of individual atoms is required. This type of measurement is required for many research areas, including, advanced silicon-based materials and devices, polymer-based devices for memory and sensor applications, micro-electro-mechanical systems (MEMS), photonic bandgap materials and devices, etc.. It is the acquisition of a Spectroscopic Ellipsometer (SE) system that is the focus of this proposal. The Spectroscopic Ellipsometer system is required for material and device analysis to facilitate the measurement of the thickness and the optical properties of thin films on a sub 1nm scale. In many applications these films can be made up of multiple layers. A Spectroscopic Ellipsometer is purpose built for analysing these type of film stacks. The fabrication and analysis of these films and devices will be carried out at the University of Manitoba. The equipment requested in this proposal will be used in conjunction with other analysis and fabrication equipment already in place in the Nano-System Fabrication Laboratory at the University of Manitoba. A few examples of the application of this system to research that is currently being undertaken at the University of Manitoba include research into silicon-based materials and devices, the development of switchable photonic band gap components, micro-electro-mechanical systems (MEMS) and conjugated polymer systems.