Characterization of nanoscale materials and devices for CMOS, bio-sensors, microfluidic and Lab-on-chip applications

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In the semiconductor industry, the increased chip speed has relied upon reduction of basic transistor size. As horizontal device dimensions become less than 0.1um, some vertical device dimensions are reduced to only a few atomic layers. At these dimensions the standard scaling laws fail. One solution would be to introduce new materials into the silicon chip fabrication process. The proposed research undertakes the fabrication, measurement and analysis of some of these materials. This research will include the integration of silicon-based technologies with other nano-electronic materials for applications in the non-traditional nano-electronic devices such as integrated micro-sensors andh molecular manipulation thorough microfluidics for biological and/or medical facilities.