Variable-angle spectroscopic ellipsometer for the characterization of complex materials structures

用于表征复杂材料结构的可变角度光谱椭偏仪

• 批准号: 391119-2010
• 负责人: Mascher, Peter
• 金额: $ 8.28万
• 依托单位: McMaster University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2009
• 资助国家: 加拿大
• 起止时间: 2009-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=443376
• 关键词: Variable; angle; spectroscopic; ellipsometer; characterization

Funding is requested for a state-of-the-art variable-angle spectroscopic ellipsometer system to replace a 20 year-old obsolete system. The ellipsometer is manufactured by J.A. Woollam Co., Inc., one of the world-leaders in the development and fabrication of high resolution ellipsometers with an outstanding reliability record. It will cover a wavelength range from the ultra-violet to the near-infrared, from 245 to 1690 nm.

要求为最先进的可变角度光谱椭偏仪系统提供资金，以取代已有20年历史的过时系统。该椭圆计由J.A. Woollam公司制造，该公司是世界上开发和制造高分辨率椭圆计的领导者之一，具有出色的可靠性记录。它将覆盖从紫外线到近红外，从245到1690纳米的波长范围。