Design, Fabrication and Characterization of Functional Thin Film Structures

功能薄膜结构的设计、制造和表征

• 批准号: RGPIN-2019-06023
• 负责人: Mascher, Peter
• 金额: $ 2.48万
• 依托单位: McMaster University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=752920
• 关键词: Design; Fabrication; Characterization; Functional; Thin

Advanced technologies rely heavily on the engineering of materials with properties and capabilities not found in nature. Examples include thin films, nanostructured materials, and advanced composites with properties superior to those of their constituents. This revolution in materials synthesis, however, would be impossible without the availability of methods of characterization and analysis that can keep pace with the reduced tolerance for defects and the need to understand structure and composition on an atomic scale. In turn, the results of detailed materials analysis can be used to provide feedback to the fabrication and processing stage, thereby further improving materials and device properties and tailoring them for specific applications, including photonics. One of the key distinguishing features of the proposed research program is the intimate link between fabrication and characterization. The long-term objective of this program of research is to design, fabricate and comprehensively characterize complex thin film structures, including -silicon--based systems for photonics applications. The principal aim is to address, in a rigorous research approach and using state--of--the--art research infrastructure, issues with a high potential impact on the science of advanced materials and the manufacturing process. The McMaster Intense Positron Beam Facility , expected to be operational by mid--2019, will give us the capacity to depth-profile open-volume defects in thin film structures, at the level of single missing or misplaced atoms, and under dynamic conditions. It will be unique in Canada and one of only a few operating worldwide. In the next 5 years, we will pursue the following short term objectives: 1) gain a better understanding of features at the atomic level that determine the optical, electronic, and mechanical properties of silicon-based thin film structures, 2) design and optimize materials (such as SiCxNy:H), structures and devices for applications in harsh environments, 3) study in detail the plasma processes leading to desired materials properties, and 4) provide a strong and direct link between advanced materials science and industry-relevant fabrication technology. The HQP participating in the various projects will acquire hands--on experience in areas of high scientific and economic relevance. For example, silicon-based photonic elements are highly desirable components of optical communication systems, solid state lighting, and all-silicon solar cells. Thus, silicon photonics is an internationally hotly pursued field, with potentially massive economic benefits. The HQP will work in some of the best materials research facilities in Canada, in multi--user, multi--disciplinary environments. The collaborations with our international partners provide the HQP with the opportunity to work at renowned laboratories abroad, which ensures a vibrant and stimulating research environment and fosters greater global awareness.

先进技术在很大程度上依赖于材料工程，这些材料具有自然界中找不到的特性和能力。例子包括薄膜、纳米结构材料和性能优于其组成成分的先进复合材料。然而，如果没有能够跟上缺陷容忍度降低的表征和分析方法，以及在原子尺度上了解结构和组成的需要，材料合成方面的这场革命是不可能的。反过来，详细的材料分析结果可用于向制造和加工阶段提供反馈，从而进一步改进材料和器件性能，并为包括光子学在内的特定应用定制它们。拟议的研究计划的一个关键区别特征是制作和表征之间的密切联系。该研究计划的长期目标是设计、制造和全面表征复杂的薄膜结构，包括用于光子学应用的硅基系统。主要目的是以严格的研究方法和使用最先进的研究基础设施，解决对先进材料科学和制造过程具有高度潜在影响的问题。麦克马斯特强流正电子束设备预计将于2019年年中投入使用，它将使我们能够在动态条件下，在单个缺失或错位原子的水平上，对薄膜结构中的开体缺陷进行深度剖析。它在加拿大将是独一无二的，也是为数不多的在全球运营的公司之一。在接下来的5年里，我们将追求以下短期目标：1)在原子水平上更好地了解决定硅基薄膜结构光学、电子和机械性能的特征；2)设计和优化材料(如SiCxNy：H)、结构和器件，用于恶劣环境中的应用；3)详细研究导致所需材料性能的等离子体工艺；以及4)在先进材料科学和与行业相关的制造技术之间建立强有力的直接联系。参加各种项目的HQP将在具有高度科学和经济意义的领域获得实践经验。例如，硅基光子元件是光通信系统、固态照明和全硅太阳能电池非常理想的组件。因此，硅光子学是国际上热衷的领域，具有潜在的巨大经济效益。HQP将在加拿大一些最好的材料研究机构中工作，在多用户、多学科的环境中工作。与国际合作伙伴的合作为总部提供了在海外知名实验室工作的机会，这确保了一个充满活力和激励的研究环境，并培养了更大的全球意识。