Sensitive synthetic dry adhesives for pick and place application in MEMS

用于 MEMS 拾放应用的敏感合成干粘合剂

• 批准号: 396909-2010
• 负责人: Sameoto, Daniel
• 金额: $ 4.85万
• 依托单位: University of Alberta
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2010
• 资助国家: 加拿大
• 起止时间: 2010-01-01 至 2011-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=467858
• 关键词: Sensitive; synthetic; dry; adhesives; pick

We are proposing the integration of novel bio-inspired adhesives into the end-effectors of robotic pick and place systems for assembly and packaging of MEMS and microfluidics. One of the most challenging issues for commercialization of MEMS or microfluidics is the final packaging of the microfabricated die. Each individual die must be carefully placed in a package containing electrical or microfluidic interconnections, sealed and bonded. Traditionally, pick and place robots have used active suction to hold die in place while moving them into position, but this requires active pneumatics, a complex end effector tip and can potentially damage devices with freely moving parts, as in the case with MEMS. Normal adhesives cannot be used because they are not switchable, and traditional tacky materials will leave residues on the surfaces of MEMS

我们提议将新型仿生粘合剂集成到机器人拾放系统的末端执行器中，用于 MEMS 和微流体的组装和封装。 MEMS 或微流体商业化最具挑战性的问题之一是微加工芯片的最终封装。每个单独的芯片必须小心地放置在包含电气或微流体互连的封装中，进行密封和粘合。传统上，拾放机器人使用主动吸力将芯片固定到位，同时将其移动到位，但这需要主动气动装置、复杂的末端执行器尖端，并且可能会损坏具有自由移动部件的设备，就像 MEMS 的情况一样。无法使用普通粘合剂，因为它们不可切换，并且传统的粘性材料会在 MEMS 表面留下残留物