Nonlinear Phenomena in RF Plasmas for Materials Processing Applications

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Nonlinear Phenomena in RF Plasmas for Materials Processing Applications. This coordinated and experimental and theoretical proposal focuses on the investigation of the nonlinear phenomena in radio frequency plasma discharges suitable for material processing applications. The effect of time-varying and steady-state nonlinear plasma responses on the electromagnetic fields and the working parameters of the low-frequency inductively coupled plasmas will be investigated theoretically and experimentally. The expected outcome of the project will be used for optimizing the performance and stability of the low frequency inductively coupled plasma devices.