Micromachined Acoustic Particle Acceleration Sensors

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We are proposing a collaborative research project with our industrial partner, Ultra Electronics Maritime Systems Inc. (UEMS) and the Department of National Defence (DND). UEMS is a leading developer of Towed Array sonar systems to detect and localize underwater targets. A Towed Array is made of hundreds of sensor nodes and typically is several hundred meters long. Each sensor node is made of four acoustic pressure sensors, setting the diameter of the Towed Array to about 10cm. Through this project, we will employ microfabrication techniques to design and fabricate particle acceleration sensors with the same level of sensitivity and dynamic range as the current sensors while reducing the diameter of the array to about 2cm. This results in significant reductions in the weight and volume of the array, and eventually, the overall system cost. UEMS is in a position financially and technically to capitalize on the results of this research to significantly enhance their current product line and deepen their niche in the market. The initial feasibility research on this work was conducted through an NSERC Engage project. Through this project, we will develop acoustic particle acceleration sensors based on ultrasensitive micromachined accelerometers with a wide bandwidth and high dynamic range. Three prototypes will be designed, fabricated, tested, and delivered to UEMS over the course of this project.