Infrared Microscope to Inspect Materials and Microsystems

用于检查材料和微系统的红外显微镜

• 批准号: RTI-2022-00497
• 负责人: Bahreyni, Behraad
• 金额: $ 10.8万
• 依托单位: Simon Fraser University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=742960
• 关键词: Infrared; Microscope; Inspect; Materials; Microsystems

This proposal aims to purchase and install a high-resolution infrared (IR) microscope at the Intelligent Sensing Laboratory (ISL) at Simon Fraser University. This infrared microscope is crucially needed for the progress of nearly all of our current, recently funded, and upcoming research projects. The requested microscope will be used for the inspection of silicon microdevices and wafers during and after the completion of fabrication processes. The operating principle relies on the fact that silicon is transparent in short- to mid-wave IR ranges. Equipped with a proper camera, objectives, and light source, the microscope allows us to see through the silicon layers and inspect the structural layers and material interfaces below the surface of the device or wafer. Since the vast majority of our research activities rely on the development of silicon microdevices based on different microfabrication processes, this microscope will become an indispensable tool in our experimental research and will be immediately integrated into the training of researchers from the co-applicants teams. The microscope is also equipped with imaging capabilities for thermal mapping of materials and devices, enabling it to be used in numerous additional research projects. Despite being an extremely valuable inspection tool, we have been unable to locate a suitable IR microscope at nearby research laboratories. The lack of access to a proper inspection tool of similar capability has created numerous challenges and has led to numerous failed fabrication runs, and hence, inefficient use of research funds while delaying the progress of the researchers. We are at the initial phases of several large projects with significant potential for scientific and technical breakthroughs. These projects rely on the successful development of several novel silicon microsystems, further highlighting the need to acquire this critical inspection tool. We will provide access to the tool to researchers beyond our teams and provide the necessary training when needed. We will also develop procedures so that remote users can have their samples sent to us and examined under the microscope with help from local operators.

该提案旨在为西蒙弗雷泽大学的智能传感实验室（ISL）购买和安装高分辨率红外（IR）显微镜。这种红外显微镜是至关重要的，几乎所有我们目前的进展，最近资助，和即将到来的研究项目。 所要求的显微镜将用于在制造过程中和完成后检查硅微器件和晶片。其工作原理依赖于硅在短波至中波红外范围内是透明的这一事实。配备了适当的相机，物镜和光源，显微镜使我们能够透过硅层看到并检查器件或晶片表面以下的结构层和材料界面。由于我们绝大多数的研究活动都依赖于基于不同微加工工艺的硅微器件的开发，因此该显微镜将成为我们实验研究中不可或缺的工具，并将立即纳入共同申请人团队研究人员的培训中。显微镜还配备了成像功能，用于材料和设备的热成像，使其能够用于许多其他研究项目。尽管是一个非常有价值的检查工具，我们一直无法找到一个合适的红外显微镜在附近的研究实验室。缺乏具有类似能力的适当检测工具带来了许多挑战，并导致了许多失败的制造运行，因此，研究资金的使用效率低下，同时延迟了研究人员的进展。我们正处于几个具有重大科技突破潜力的大型项目的初始阶段。这些项目依赖于几种新型硅微系统的成功开发，进一步强调了获得这种关键检测工具的必要性。我们将为我们团队以外的研究人员提供使用该工具的机会，并在需要时提供必要的培训。我们还将制定程序，以便远程用户可以将他们的样本发送给我们，并在当地操作员的帮助下在显微镜下进行检查。