Development of MEMS (Microelectromechanical Systems) actuation technology and micro actuator based MEMS devices

MEMS（微机电系统）致动技术和基于MEMS器件的微致动器的开发

• 批准号: 341872-2012
• 负责人: He, Siyuan
• 金额: $ 1.89万
• 依托单位: Ryerson University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=572392
• 关键词: Development; MEMS; Microelectromechanical; Systems; actuation

The proposed research focuses on developing MEMS actuation technology and micro actuator based MEMS devices to solve industry problems: (i) Automotive HUD (Head-Up-Display) displays the driving information on the windshield or on the road through a virtual image, such that the driver can have longer eyes-on-road time to improve the driving safety. The current LCD HUD has not been widely used in general cars due to its high cost and performance limitations. This research will develop MEMS actuator of high performance to build MEMS laser vector scanning HUD with superior performance over existing technology including much higher brightness, much wider angle of view, significantly reduced size and cost. Due to its high performance and low cost, the MEMS HUD will significantly expand the application of HUD in cars, trucks and buses to improve the driving safety; (ii) Current VCM (Voice Coil Motor) autofocus for phone cameras cannot meet industry requirements due to its high power consumption, low accuracy and low response speed. With the increasing resolution and decreasing size of phone cameras, the handshake becomes a non-negligible factor affecting the image quality. The phone camera industry has been looking for OIS (Optical Image Stabilization) technology to compensate for the handshake. Currently no OIS has been implemented in commercial phone cameras due to the lack of actuator suitable for OIS. In this research, a novel MEMS actuator will be developed to realize both autofocus and OIS for phone cameras with high response speed, lower power and high accuracy; and (iii) This research will develop a novel MEMS actuator to build MEMS FT-IR (Fourier Transform Infrared) spectrometer which has the advantages of small size, high robustness and low cost over conventional designs. The MEMS F-IR spectrometer is a high precision chemical analyzer and suitable for onsite industry process control, environmental and security monitoring. In this research it will be used for the next generation automotive alcohol interlock.

本研究的重点是开发MEMS驱动技术和基于微驱动器的MEMS器件，以解决行业问题：（i）汽车HUD（平视显示器）通过虚拟图像在挡风玻璃上或道路上显示驾驶信息，使驾驶员可以有更长的眼睛在路上的时间，以提高驾驶安全性。目前的LCD HUD由于其高成本和性能的限制，还没有在一般汽车中广泛使用。本研究将开发高性能的MEMS驱动器，以建立MEMS激光矢量扫描平显与现有技术相比具有上级性能，包括更高的亮度，更宽的视角，显着降低尺寸和成本。由于其高性能和低成本，MEMS HUD将显著扩大HUD在汽车、卡车和公共汽车上的应用，以提高驾驶安全性;（ii）目前用于手机摄像头的VCM（音圈电机）自动对焦由于其高功耗、低精度和低响应速度而不能满足行业要求。随着手机摄像头分辨率的提高和尺寸的减小，握手成为影响图像质量的一个不可忽视的因素。手机摄像头行业一直在寻找OIS（光学图像稳定）技术来补偿握手。由于缺乏适合于OIS的致动器，目前还没有在商用电话相机中实现OIS。在本研究中，将开发一种新型的MEMS致动器，以实现自动对焦和OIS的手机摄像头具有高响应速度，低功耗和高精度;（iii）本研究将开发一种新型的MEMS致动器，以建立MEMS傅立叶变换红外光谱仪（傅立叶变换红外），它具有体积小，鲁棒性高，成本低，比传统的设计。MEMS F-IR光谱仪是一款高精度化学分析仪，适用于现场工业过程控制、环境和安全监测。在这项研究中，它将用于下一代汽车酒精联锁。