Development of MEMS (Microelectromechanical Systems) actuation technology and micro actuator based MEMS devices

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The proposed research focuses on developing MEMS actuation technology and micro actuator based MEMS devices to solve industry problems: (i) Automotive HUD (Head-Up-Display) displays the driving information on the windshield or on the road through a virtual image, such that the driver can have longer eyes-on-road time to improve the driving safety. The current LCD HUD has not been widely used in general cars due to its high cost and performance limitations. This research will develop MEMS actuator of high performance to build MEMS laser vector scanning HUD with superior performance over existing technology including much higher brightness, much wider angle of view, significantly reduced size and cost. Due to its high performance and low cost, the MEMS HUD will significantly expand the application of HUD in cars, trucks and buses to improve the driving safety; (ii) Current VCM (Voice Coil Motor) autofocus for phone cameras cannot meet industry requirements due to its high power consumption, low accuracy and low response speed. With the increasing resolution and decreasing size of phone cameras, the handshake becomes a non-negligible factor affecting the image quality. The phone camera industry has been looking for OIS (Optical Image Stabilization) technology to compensate for the handshake. Currently no OIS has been implemented in commercial phone cameras due to the lack of actuator suitable for OIS. In this research, a novel MEMS actuator will be developed to realize both autofocus and OIS for phone cameras with high response speed, lower power and high accuracy; and (iii) This research will develop a novel MEMS actuator to build MEMS FT-IR (Fourier Transform Infrared) spectrometer which has the advantages of small size, high robustness and low cost over conventional designs. The MEMS F-IR spectrometer is a high precision chemical analyzer and suitable for onsite industry process control, environmental and security monitoring. In this research it will be used for the next generation automotive alcohol interlock.