Low-cost batch fabrication method of high aspect ratio AFM tips

高深宽比 AFM 针尖的低成本批量制造方法

基本信息

  • 批准号:
    452035-2013
  • 负责人:
  • 金额:
    $ 4.37万
  • 依托单位:
  • 依托单位国家:
    加拿大
  • 项目类别:
    Idea to Innovation
  • 财政年份:
    2015
  • 资助国家:
    加拿大
  • 起止时间:
    2015-01-01 至 2016-12-31
  • 项目状态:
    已结题

项目摘要

Atomic force microscope (AFM) is the most popular characterization tool among the scanning probe microscope (SPM) family. Compared to scanning electron microscope (SEM), AFM has lower cost, much more accurate (by one order) in the z-direction and x-y direction if the sample is flat, and can work equally well with insulating sample or even inside a liquid environment. Nevertheless, SEM is still far more popular than AFM for topographical structure characterization, mostly because of the intrinsic limit in the AFM image when mapping a none-flat surface (e.g a deep and narrow hole/trench) where the tip cannot fully follow the sample surface. The natural solution to overcome this issue is by using thin and high aspect ratio tips that can follow the sample surface more precisely. The objective of this project is to develop the fabrication process for high aspect ratio AFM tips. The key feature of the technology is that it is a low-cost batch fabrication process with high yield. The process starts from a wafer of AFM tips containing 380 regular pyramid-shaped tips, and process them simultaneously to produce fine and high aspect ratio pillars at the tip apex. Currently all the commercially available high aspect ratio AFM tips are made one by one, in a slow and costly manner. On the contrary, our process is a batch fabrication process, and is thus with much higher throughput and much lower fabrication cost per tip.
原子力显微镜(AFM)是扫描探针显微镜(SPM)家族中最常用的表征工具。与扫描电子显微镜(SEM)相比,AFM具有更低的成本,如果样品是平坦的,则在z方向和x-y方向上的精度更高(一个数量级),并且可以在绝缘样品甚至液体环境中同样良好地工作。尽管如此,SEM在形貌结构表征方面仍然比AFM更受欢迎,主要是因为AFM图像在绘制非平坦表面(例如深而窄的孔/沟槽)时的固有限制,其中尖端不能完全跟随样品表面。克服这个问题的自然解决方案是使用薄且高纵横比的尖端,这些尖端可以更精确地跟随样品表面。 本计画的目的是发展高深宽比原子力显微镜针尖的制程。该技术的主要特点是它是一种低成本的批量制造工艺,产量高。该过程从包含380个规则的X形尖端的AFM尖端的晶片开始,并且同时处理它们以在尖端顶点处产生精细且高纵横比的柱。 目前,所有商业上可获得的高纵横比AFM针尖都是以缓慢且昂贵的方式一个接一个地制造。相反,我们的工艺是批量制造工艺,因此具有高得多的产量和低得多的每个尖端的制造成本。

项目成果

期刊论文数量(0)
专著数量(0)
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会议论文数量(0)
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Cui, Bo其他文献

Tannic acid-based nanopesticides coating with highly improved foliage adhesion to enhance foliar retention.
  • DOI:
    10.1039/c9ra05843e
  • 发表时间:
    2019-08-23
  • 期刊:
  • 影响因子:
    3.9
  • 作者:
    Yu, Manli;Sun, Changjiao;Xue, Yumiao;Liu, Chang;Qiu, Dewen;Cui, Bo;Zhang, Yan;Cui, Haixin;Zeng, Zhanghua
  • 通讯作者:
    Zeng, Zhanghua
High resolution electron beam lithography of PMGI using solvent developers
  • DOI:
    10.1016/j.mee.2008.01.008
  • 发表时间:
    2008-05-01
  • 期刊:
  • 影响因子:
    2.3
  • 作者:
    Cui, Bo;Veres, Teodor
  • 通讯作者:
    Veres, Teodor
Comparison of rheological properties of different protein/gum arabic complex coacervates
A single-composition CaSi2O2N2:RE (RE=Ce3+/Tb3+, Eu2+, Mn2+) phosphor nanofiber mat: Energy transfer, luminescence and tunable color properties
  • DOI:
    10.1016/j.jssc.2017.04.012
  • 发表时间:
    2017-09-01
  • 期刊:
  • 影响因子:
    3.3
  • 作者:
    Cui, Bo;Chen, Zhenhua;Li, Yaogang
  • 通讯作者:
    Li, Yaogang
Isolation and characterization of cellulose nanocrystals from Chinese medicine residues.
  • DOI:
    10.1007/s13399-022-03380-6
  • 发表时间:
    2022-10-14
  • 期刊:
  • 影响因子:
    4
  • 作者:
    He, Qiang;Bai, Yu;Lu, Yuxi;Cui, Bo;Huang, Ziqiang;Yang, Qince;Jiang, Donghua;Shao, Dongwei
  • 通讯作者:
    Shao, Dongwei

Cui, Bo的其他文献

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{{ truncateString('Cui, Bo', 18)}}的其他基金

Microneedle fabrication and applications
微针的制备及应用
  • 批准号:
    RGPIN-2021-02984
  • 财政年份:
    2022
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Discovery Grants Program - Individual
Microneedle fabrication and applications
微针的制备及应用
  • 批准号:
    RGPIN-2021-02984
  • 财政年份:
    2021
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Discovery Grants Program - Individual
Fabrication of terahertz antenna for THz spectroscopy applications
用于太赫兹光谱应用的太赫兹天线的制造
  • 批准号:
    536473-2018
  • 财政年份:
    2020
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Collaborative Research and Development Grants
Fabrication of high aspect ratio AFM probes with diamond apex
具有金刚石尖端的高纵横比 AFM 探针的制造
  • 批准号:
    543529-2019
  • 财政年份:
    2020
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Collaborative Research and Development Grants
Fabrication of photoconductive antenna with mesa structure for terahertz spectroscopy
太赫兹光谱台面结构光电导天线的制作
  • 批准号:
    561097-2020
  • 财政年份:
    2020
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Alliance Grants
Fabrication of sub-wavelength nanostructure array for optical filter applications
用于光学滤波器应用的亚波长纳米结构阵列的制造
  • 批准号:
    561100-2020
  • 财政年份:
    2020
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Alliance Grants
Fabrication of microneedles for skin interstitial fluid extraction for allergy testing
用于提取皮肤间质液用于过敏测试的微针的制造
  • 批准号:
    530328-2018
  • 财政年份:
    2019
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Collaborative Research and Development Grants
Fabrication of terahertz antenna for THz spectroscopy applications
用于太赫兹光谱应用的太赫兹天线的制造
  • 批准号:
    536473-2018
  • 财政年份:
    2019
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Collaborative Research and Development Grants
Fabrication of high aspect ratio AFM probes with diamond apex
具有金刚石尖端的高纵横比 AFM 探针的制造
  • 批准号:
    543529-2019
  • 财政年份:
    2019
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Collaborative Research and Development Grants
Advanced nanostructure and device fabrication
先进的纳米结构和器件制造
  • 批准号:
    RGPIN-2015-04124
  • 财政年份:
    2019
  • 资助金额:
    $ 4.37万
  • 项目类别:
    Discovery Grants Program - Individual

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