Development of novel trace contaminant removal technology for extending Excimer Laser life

开发新型痕量污染物去除技术以延长准分子激光器寿命

• 批准号: 477801-2015
• 负责人: Donaldson, Adam
• 金额: $ 0.91万
• 依托单位: Dalhousie University
• 依托单位国家: 加拿大
• 项目类别: Engage Plus Grants Program
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=579094
• 关键词: Development; novel; trace; contaminant; removal

LightMachinery is a manufacturer of high power gas discharge TEA CO2 and Excimer lasers based out of Ottawa, ON. Over the past several years, this company has been seeking new ways of extending the useable lifespan of their lasers through removal of trace impurities generated within the system during operation. Within a recently completed Engage grant between LightMachinery and Dalhousie University, preliminary testing of adsorption-based technology for removal of acid gases from industrial process streams provided promising results for the selective reduction of contaminant gases which negatively effect laser performance and lifespan. The proposed project continues to explore the potential of this technology, focusing on variations in adsorbent preparation methods and their impact on separation performance, as well as practical performance testing within industrial laser units. This project is exploring novel methods of addressing the key deactivation mechanism which limits the life-span of gas fills for Fluoride-based Excimer lasers, and is anticipated to yield direct, measurable performance improvements over the course of the Engage Plus grant period.

LightMachinery是一家高功率气体放电TEA CO2和准分子激光器的制造商， 渥太华，安大略省。在过去的几年里，该公司一直在寻求新的方法来扩展可用的 通过去除系统运行过程中产生的微量杂质，延长激光器的使用寿命。 在LightMachinery和达尔豪西大学最近完成的Engage赠款中，初步 提供了用于从工业过程流中去除酸性气体的基于吸附的技术的测试 有希望的结果，选择性减少污染气体的负面影响激光器的性能 和寿命。拟议项目继续探索这项技术的潜力，重点是各种变化， 吸附剂的制备方法及其对分离性能的影响，以及实际性能 在工业激光装置中进行测试。该项目正在探索解决关键失活的新方法 限制氟化物准分子激光器气体填充物寿命的机制，预计将产生 在Engage Plus资助期内实现直接、可衡量的绩效改进。