Systems and Technologies for Emerging Micro Sensors and Applications

用于新兴微型传感器和应用的系统和技术

• 批准号: RGPIN-2015-05294
• 负责人: ElGamal, Mourad
• 金额: $ 2.19万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=590338
• 关键词: Systems; Technologies; Emerging; Micro; Sensors

The demand for miniature and high performance sensors and systems has been growing over the last decade. This is evident in many systems around us, notably in mobile phones which are becoming sophisticated environmental stations, with so many sensors such as pressure, humidity, accelerometers, etc.Micro-electromechanical systems (MEMS) are at the core of this recent "revolution". As a simple point of reference, the global micro-sensors and actuators market is expected to grow by ~$7 billion (~11 billion sensors) over the next 5 years [IC Insight, April 2014]. This growth needs to be supported by numerous technical innovations on many fronts, specifically i) the level of miniaturization and overall size, ii) the performance of the different constituents of a sensor chip (mechanical, electrical,.), iii) cost, iv) packaging, etc.We plan on pursuing 3 major research thrusts in parallel, with the aim of developing novel and breakthrough solutions that address the opportunities discussed above:1. NEW MEMS PROCESSES DEVELOPMENT ">THE DEVELOPMENT OF HIGH PERFORMANCE AND NEW MEMS SENSORS AND DEVICESWhile many MEMS sensors already exist, there is a great interest and demand for higher performance sensors, and for completely new types of sensors, either to replace already existing solutions in smaller form factors, or with higher performance, or both. We will not focus on sensing devices only, but we will also pursue other micro devices that can clearly benefit from our MEMS technology. 3. DESIGN AND DEVELOPMENT OF CUTTING-EDGE INTEGRATED CIRCUIT FRONT-ENDSAlmost every micro-mechanical sensor or actuator requires high quality, and often specifically dedicated supporting electronics. In addition to the MEMS development activities described above, we will pursue the development of new sensing/control integrated circuit solutions that would augment the MEMS devices, resulting in fully functional smart chips.

过去十年，对微型高性能传感器和系统的需求一直在增长。这在我们周围的许多系统中都很明显，特别是在移动电话中，它们正在成为复杂的环境站，具有如此多的传感器，如压力、湿度、加速度计等。微机电系统 (MEMS) 是最近这场“革命”的核心。作为一个简单的参考，全球微传感器和执行器市场预计在未来 5 年内将增长约 70 亿美元（约 110 亿个传感器）[IC Insight，2014 年 4 月]。这种增长需要得到许多方面的技术创新的支持，特别是 i) 小型化水平和总体尺寸，ii) 传感器芯片不同组成部分的性能（机械、电气等），iii) 成本，iv) 封装等。我们计划并行开展 3 个主要研究方向，旨在开发新颖且突破性的解决方案来应对上述机遇：1。新的 MEMS 工艺开发 ">高性能和新型 MEMS 传感器和设备的开发虽然已经存在许多 MEMS 传感器，但人们对更高性能的传感器和全新类型的传感器有很大的兴趣和需求，要么以更小的外形尺寸取代现有的解决方案，要么以更高的性能，或两者兼而有之。我们不会只专注于传感设备，但我们还将寻求其他可以明显受益于我们的 MEMS 技术的微型设备。 3. 尖端集成电路的设计与开发 前端几乎每个微机械传感器或执行器都需要高质量，并且通常需要专门的专用支持电子设备。 除了上述 MEMS 开发活动外，我们还将致力于开发新的传感/控制集成电路解决方案，以增强 MEMS 设备，从而形成功能齐全的智能芯片。