Systems and Technologies for Emerging Micro Sensors and Applications

在过去的十年中，对微型和高性能传感器和系统的需求一直在增长。这在我们周围的许多系统中是明显的，特别是在移动的电话中，这些电话正在成为复杂的环境站，具有如此多的传感器，例如压力、湿度、加速度计等。微机电系统（MEMS）是最近这场“革命”的核心。作为一个简单的参考点，全球微型传感器和执行器市场预计将在未来5年内增长约70亿美元（约110亿个传感器）[IC Insight，2014年4月]。这种增长需要在许多方面得到许多技术创新的支持，特别是i）小型化和整体尺寸的水平，ii）传感器芯片的不同组成部分（机械的、电的）的性能，iii）成本，iv）包装等。我们计划并行进行3个主要研究方向，旨在开发新颖和突破性的解决方案，以解决上述机会：1.新型MEMS传感器的开发“>高性能和新型MEMS传感器和器件的开发虽然已经存在许多MEMS传感器，但人们对更高性能的传感器和全新类型的传感器有很大的兴趣和需求，以取代现有的更小外形尺寸的解决方案，或具有更高的性能，或两者兼而有之。我们将不仅专注于传感器件，还将追求其他可以从我们的MEMS技术中明显受益的微型器件。 3.尖端集成前端的设计和开发几乎每一个微机械传感器或执行器都需要高质量，并且通常需要专门的支持电子设备。 除了上述MEMS开发活动外，我们还将开发新的传感/控制集成电路解决方案，以增强MEMS器件，从而实现功能齐全的智能芯片。

The demand for miniature and high performance sensors and systems has been growing over the last decade. This is evident in many systems around us, notably in mobile phones which are becoming sophisticated environmental stations, with so many sensors such as pressure, humidity, accelerometers, etc.Micro-electromechanical systems (MEMS) are at the core of this recent "revolution". As a simple point of reference, the global micro-sensors and actuators market is expected to grow by ~$7 billion (~11 billion sensors) over the next 5 years [IC Insight, April 2014]. This growth needs to be supported by numerous technical innovations on many fronts, specifically i) the level of miniaturization and overall size, ii) the performance of the different constituents of a sensor chip (mechanical, electrical,.), iii) cost, iv) packaging, etc.We plan on pursuing 3 major research thrusts in parallel, with the aim of developing novel and breakthrough solutions that address the opportunities discussed above:1. NEW MEMS PROCESSES DEVELOPMENT ">THE DEVELOPMENT OF HIGH PERFORMANCE AND NEW MEMS SENSORS AND DEVICESWhile many MEMS sensors already exist, there is a great interest and demand for higher performance sensors, and for completely new types of sensors, either to replace already existing solutions in smaller form factors, or with higher performance, or both. We will not focus on sensing devices only, but we will also pursue other micro devices that can clearly benefit from our MEMS technology. 3. DESIGN AND DEVELOPMENT OF CUTTING-EDGE INTEGRATED CIRCUIT FRONT-ENDSAlmost every micro-mechanical sensor or actuator requires high quality, and often specifically dedicated supporting electronics. In addition to the MEMS development activities described above, we will pursue the development of new sensing/control integrated circuit solutions that would augment the MEMS devices, resulting in fully functional smart chips.